光子学报, 2015, 44 (4): 0430002, 网络出版: 2015-04-28  

傅里叶变换红外光谱仪中动镜系统的设计

Design of a Moving Mirror Scanning System in Fourier Transform Infrared Spectrometer
作者单位
1 北京雪迪龙科技股份有限公司, 北京 102206
2 北京航天控制仪器研究所, 北京 100854
摘要
为提升傅里叶变换红外光谱仪的整体性能, 基于立体角镜与平面镜组合的光学结构, 设计了一种柔性支撑机构的摆动型动镜机构.建立和分析该机构控制模型, 设计了相适应的反馈控制算法.结果表明: 该结构具有无摩擦、抗震性好等优点;光学结构能够很好地补偿动镜摆动造成的倾斜与横移误差, 保证仪器的重复性与稳定性; 通过对控制算法参量的调整, 动镜机构的扫描准确度优于98.4%.在4 cm-1的光谱分辨率条件下, 使用该动镜机构所测得的红外光谱信噪比优于80000: 1, 能够满足高准确度定量分析的要求.
Abstract
Inorder to improve the performance of Fourier Transform Infrared Spectrometer, the optical structure was based on the combination of cube corner mirror and fixed plane mirror, a swing mechanism moving mirror scanning system was designed. The system transfer function was established and the characteristics of control model was analysised, a feedback algorithm was designed to fit the system. It indicates that the system was friction free and insensitive to vibration; the optical structure can compensate the tilt and shift caused by the swing of the moving mirror, ensure the repeatabilty and stability of instrument; the algorithm parameters was adjusted to improve scanning accuracy, and the precision is better than 98.4%. The SNR of spectral is better than 80000: 1 by using the system, under 4 cm-1,which can meet the requirements of high precision quantitative analysis.
参考文献

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石磊, 刘佳, 郜武, 张倩暄, 王巍. 傅里叶变换红外光谱仪中动镜系统的设计[J]. 光子学报, 2015, 44(4): 0430002. SHI Lei, LIU Jia, GAO Wu, ZHANG Qian-xuan, WANG Wei. Design of a Moving Mirror Scanning System in Fourier Transform Infrared Spectrometer[J]. ACTA PHOTONICA SINICA, 2015, 44(4): 0430002.

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