多层衍射光学元件斜入射衍射效率的测量

为了验证多层衍射光学元件的衍射效率随入射角度的理论变化关系，设计并制作了一个含有多层衍射光学元件（MLDOEs）的光学系统。当次级衍射光通过孔径光阑由探测器接收时，为保证衍射效率的测量精度，提出了一级衍射能量的修正方法。利用搭建的双光路装置，在0°~30.6°范围内对该多层衍射光学元件进行了衍射效率的测量。针对设计波长532 nm，选取7个入射角度测量衍射效率，并对测量结果进行了模拟和分析。由于存在一定的加工误差，在不同入射角度状态下实际测量得到的衍射效率比理论分析的结果低，但是实测与理论分析结果均表明，多层衍射光学元件的衍射效率随入射角的增大而下降。

Abstract

In order to verify the theoretical relationship of the diffraction efficiency of multi-layer diffractive optical elements varying with the angle of incidence, an optical system with multi-layer diffractive optical elements is designed and manufactured. To ensure the measurement accuracy of diffraction efficiency when light of secondary order diffraction is received by the detector after passing through the pinhole aperture, a correction method of first-order diffraction energy is proposed. The diffraction efficiency of the multi-layer diffractive optical elements with the incident angles ranging from 0° to 30.6° is measured by the established double light-path measurement device. Diffraction efficiency is measured at seven different incident angles with the designed wavelength of 532 nm, and the measurement results are simulated and analyzed. Due to some manufacturing errors, the diffraction efficiency obtained by the actual measurement is lower than the theoretical analysis results. However, both measured and theoretical results show that the diffraction efficiency of multi-layer diffractive optical elements declines with the increase of incident angle.

参考文献

[1] 裴雪丹，崔庆丰，冷家开．入射角对双层衍射光学元件衍射效率的影响［J］. 光学学报, 2009, 29(1): 120-125.

Pei Xuedan, Cui Qingfeng, Leng Jiakai. Effect of incident angle on diffraction efficiency of a two-layer diffractive optical element［J］. Acta Optica Sinica, 2009, 29(1): 120-125.

[2] Arieli Y, Ozeri S, Eisenberg N. Design of a diffractive optical element for wide spectral bandwidth［J］. Optics Letters, 1998, 23(11): 823-824.

[3] Xue C X, Cui Q F, Liu T, et al. Optimal design of a multilayer diffractive optical element for dual waveband［J］. Optics Letters, 2010, 35(24): 4157-4159.

[4] Li J S, Feng K. Optimization and analysis of multi-layer diffractive optical elements in visible waveband［J］. Optik, 2014, 125(14): 3596-3598.

[5] 毛文峰, 张新, 曲贺盟, 等. 红外双色宽波段高衍射效率衍射光学系统设计［J］. 光学学报, 2014, 34(10): 1022002.

Mao Wenfeng, Zhang Xin, Qu Hemeng, et al. Broad dual-band kinoform infrared double-layer diffractive optical system design［J］. Acta Optica Sinica, 2014, 34(10): 1022002.

[6] Wood A P. A hybrid refractive-diffractive lens for manufacture by diamond turning［C］. SPIE, 1991, 1573: 122-128.

[7] Blough C G, Rossi M, Mack S K, et al. Single-point diamond turning and replication of visible and near-infrared diffractive optical elements［J］. Applied Optics, 1997, 36(20): 4648-4654.

[8] 殷可为, 黄智强, 林妩媚, 等. 二元光学元件横向加工误差对衍射效率的影响［J］. 光电工程, 2011, 38(9): 46-49.

Yin Kewei, Huang Zhiqiang, Lin Wumei, et al. Analysis of effect of lateral fabrication errors on binary optical elements［J］. Opto-Electronic Engineering, 2011, 38(9): 46-49.

[9] Yang L L, Cui Q F, Liu T, et al. Effects of manufacturing errors on diffraction efficiency for multilayer diffractive optical elements［J］. Applied Optics, 2011, 50(32): 6128-6133.

[10] 高龙, 薛常喜, 杨红芳, 等. 偏心误差对长波红外波段多层衍射光学元件衍射效率的影响［J］. 光学学报, 2015, 35(6): 0623004.

Gao Long, Xue Changxi, Yang Hongfang, et al. Effect of decenter errors on diffraction efficiency of multilayer diffractive optical elements in long infrared waveband［J］. Acta Optica Sinica, 2015, 35(6): 0623004.

[11] 毛珊, 崔庆丰. 双层衍射元件加工误差对带宽积分平均衍射效率的影响［J］. 光学学报, 2016, 36(1): 0105001.

Mao Shan, Cui Qingfeng. Effect on polychromatic integral diffraction efficiency for two-layer diffractive optics［J］. Acta Optica Sinica, 2016, 36(1): 0105001.

[12] 杨亮亮, 崔庆丰, 刘涛, 等. 衍射光学元件衍射效率的测量［J］. 光学学报, 2012, 32(4): 0412007.

Yang Liangliang, Cui Qingfeng, Liu Tao, et al. Measurement of diffraction efficiency for diffractive optical elements［J］. Acta Optica Sinica, 2012, 32(4): 0412007.

[13] Zhao Y H, Fan C J, Ying C F, et al. The investigation of triple-layer diffraction optical element with wide field of view and high diffraction efficiency［J］. Optics Communications, 2013, 295(15): 104-107.

[14] 杨亮亮. 多层衍射光学元件衍射效率的研究［D］. 长春: 长春理工大学, 2013.

Yang Liangliang. Studies on diffraction efficiency of multilayer diffractive optical elements［D］. Changchun: Changchun University of Science and Technology, 2013.

[15] Bass M. Handbook of optics II［M］. New York: McGraw-Hill, 1995.

[16] Xue C X, Cui Q F. Design of multilayer diffractive optical elements with polychromatic integral diffraction efficiency［J］. Optics Letters, 2010, 35(7): 986-988.

杨亮亮. 多层衍射光学元件斜入射衍射效率的测量[J]. 光学学报, 2017, 37(2): 0205003. Yang Liangliang. Measurement of Diffraction Efficiency for Multi-Layer Diffractive Optical Elements with Oblique Incidence[J]. Acta Optica Sinica, 2017, 37(2): 0205003.

多层衍射光学元件斜入射衍射效率的测量

关于本站 Cookie 的使用提示

全站搜索

多层衍射光学元件斜入射衍射效率的测量

相关论文

相关资讯

关于本站 Cookie 的使用提示

全站搜索