中国激光, 2007, 34 (9): 1282, 网络出版: 2007-10-17   

温度对飞秒激光沉积ZnO/Si薄膜的结构和性能的影响

Effect of Temperature on Structure and Properties of Femtosecond Laser Deposited Silicon Based Zinc Oxide Thin Films
杨义发 1,2,3,*龙华 1,2杨光 1,2戴能利 1,2郑启光 1,2陆培祥 1,2
作者单位
1 华中科技大学武汉光电国家实验室, 湖北 武汉 430074
2 华中科技大学光电子科学与工程学院, 湖北 武汉 430074
3 湖北师范学院物理系, 湖北 黄石 435002
摘要
通过飞秒脉冲激光(50 fs,800 nm,1 kHz,2 mJ)沉积技术在n型Si(100)单晶基片上制备了ZnO薄膜。详细研究了基片温度变化以及退火处理对ZnO薄膜的结构、表面形貌及光学性质的影响。X射线衍射(XRD)结果表明,不同温度下(20~350 ℃)生长的ZnO薄膜具有纤锌矿结构,并且呈c轴择优取向;当基片温度为80 ℃时,薄膜沿(002)晶面高度择优生长;当基片温度为500 ℃时薄膜沿(103)晶面择优生长,场发射扫描电子显微镜(FEEM)结果表明薄膜呈纳米晶结构,并观察到了ZnO的六方结构。进一步通过透射光谱的测量讨论了基片温度及退火处理对ZnO薄膜光学透射率的影响,结果表明退火后薄膜的透射率增大。
Abstract
Zinc oxide films were prepared on n type Si(100) substrate using femtosecond laser deposition with laser parameters as follows: pulse width 50 fs, wavelength 800 nm, repeat frequency 1 kHz, and pulse energy 2 mJ. The effects of substrate temperature change and annealing on the structure, surface morphology and optical properties of the ZnO films were discussed. The X-ray diffraction (XRD) results showed the ZnO films deposited under different temperature (20~350 ℃) were with wurtzite structure and highly c-axis oriented. When the substrate silicon was 80 ℃ the film was highly (002)-oriented, and (103)-oriented at 500 ℃. The nano-crystal structure of the films and hexagonal structure of ZnO were observed with a field-emission electron microscope (FEEM). The effects of substrate temperature and annealing on the optical transmissivity of ZnO films were discussed by transmitted spectra, and the transmissivity was increased after annealing.
参考文献

[1] . Srikant, D. R. Clarke. On the optical band gap of zinc oxide[J]. J. Appl. Phys., 1998, 83(10): 5447-5451.

[2] . K. Tang, G. K. Wang, P. Yu et al.. Room-temperature ultraviolet laser emission from self-assembled ZnO microcrystallite thin films[J]. Appl. Phys. Lett., 1998, 72(25): 3270-3272.

[3] . Cao, Y. G. Zhao, H. C. Ong et al.. Ultraviolet lasing in resonators formed by scattering in semiconductor polycrystalline films[J]. Appl. Phys. Lett., 1998, 73(25): 3656-3658.

[4] . . Single-crystal nanorings formed by epitaxial self-coiling of polar nanobelts[J]. Science, 2004, 303(5662): 1348-1351.

[5] . . Conversion of zinc oxide nanobelts into superlattice- structured nanohelices[J]. Science, 2005, 309(5741): 1700-1704.

[6] . Piezoelectric nanogenerators based on zinc oxide nanowire arrays[J]. Science, 2006, 312(5771): 242-246.

[7] . Onuma, S. F. Chichibu, A. Uedono et al.. Reduced defect densities in the ZnO epilayer grown on Si substrates by laser-assisted molecular-beam epitaxy using a ZnS epitaxial buffer layer[J]. Appl. Phys. Lett., 2004, 85(23): 5586-5588.

[8] . Photoluminescence dependence of ZnO films grown on Si(100) by radio-frequency magnetron sputtering on the growth ambient[J]. Appl. Phys. Lett., 2003, 82(16): 2625-2627.

[9] Deping Xiong, Xiqing Zhang, Jing Wang et al.. Optical properties of ZnO thin films on SiO2 substrates deposited by radio frequency magnetron sputtering [J]. Chin. Opt. Lett., 2004, 2(3):179~181

[10] Peng Xingping,Yang Yinghu, Song Changan et al.. Preparation and study of properties of indium-doped ZnO films on Si substrates [J]. Acta Optica Sincia, 2004, 24(11):1459~1462
朋兴平,杨映虎,宋长安 等. In掺杂ZnO薄膜的制备及其特性研究[J]. 光学学报, 2004, 24(11):1459~1462

[11] Pan Zhifeng, Yuan Yifang, Kong Fanzhi. Effect of substrate temperature on the structure of crystallization and transfer rate of ZnO thin films [J]. Chinese J. Lasers, 2004, 31(4):462~464
潘志峰,袁一方,孔繁之. 衬底温度对ZnO薄膜晶体结构和迁移率的影响[J]. 中国激光, 2004, 31(4):462~464

[12] Xinli Guo, Hitoshi Tabata, Tomoji Kawai. Pulsed laser reactive deposition of p-type ZnO film enhanced by an electron cyclotron resonance source [J]. J. Cryst. Growth., 2001, 223(1-2):135~139

[13] Jinzhong Wang, Guotong Du, Yuantao Zhang et al.. Luminescence properties of ZnO films annealed in growth ambient and oxygen [J]. J. Cryst. Growth., 2004, 263(1-4):269~272

[14] Masayuki Okoshi, Kouji Higashikawa, Mitsugu Hanabusa. Pulsed laser deposition of ZnO thin films using a femtosecond laser [J]. Appl. Surf. Sci., 2000, 154-155:424~427

[15] . Millon, O. Albert, J. C. Loulerge et al.. Growth of heteroepitaxial ZnO thin films by femtosecond pulsed-laser deposition[J]. J. Appl. Phys., 2000, 88(11): 6937-6939.

[16] . Perriere, E. Millona, W. Seiler et al.. Comparison between ZnO films grown by femtosecond and nanosecond laser ablation[J]. J. Appl. Phys., 2002, 91(2): 690-696.

[17] . . Thickness measurement of GaN film based on transmission spectr[J]. Acta Physica Sinica, 2004, 53(4): 1243-1246.

[18] D. R. MeKenzie, M. M. Bilek. Thermodynamic theory for preferred orientation in materials prepared by energetic condensation [J]. Thin Solid Films, 2001, 382(1-2):280~287

杨义发, 龙华, 杨光, 戴能利, 郑启光, 陆培祥. 温度对飞秒激光沉积ZnO/Si薄膜的结构和性能的影响[J]. 中国激光, 2007, 34(9): 1282. 杨义发, 龙华, 杨光, 戴能利, 郑启光, 陆培祥. Effect of Temperature on Structure and Properties of Femtosecond Laser Deposited Silicon Based Zinc Oxide Thin Films[J]. Chinese Journal of Lasers, 2007, 34(9): 1282.

本文已被 7 篇论文引用
被引统计数据来源于中国光学期刊网
引用该论文: TXT   |   EndNote

相关论文

加载中...

关于本站 Cookie 的使用提示

中国光学期刊网使用基于 cookie 的技术来更好地为您提供各项服务,点击此处了解我们的隐私策略。 如您需继续使用本网站,请您授权我们使用本地 cookie 来保存部分信息。
全站搜索
您最值得信赖的光电行业旗舰网络服务平台!