光学学报, 2016, 36 (9): 0911004, 网络出版: 2016-09-09   

基于背景校正和图像分割定量分析光学元件表面疵病的新算法 下载: 554次

New Algorithm of Detecting Optical Surface Imperfection Based on Background Correction and Image Segmentation
作者单位
1 上海大学材料科学与工程学院, 上海 200444
2 中国科学院上海光学精密机械研究所强激光材料重点实验室, 上海 201800
引用该论文

张博, 倪开灶, 王林军, 刘世杰*, 吴伦哲. 基于背景校正和图像分割定量分析光学元件表面疵病的新算法[J]. 光学学报, 2016, 36(9): 0911004.

Zhang Bo, Ni Kaizao, Wang Linjun, Liu Shijie, Wu Lunzhe. New Algorithm of Detecting Optical Surface Imperfection Based on Background Correction and Image Segmentation[J]. Acta Optica Sinica, 2016, 36(9): 0911004.

参考文献

[1] 谢世斌, 杨甬英, 刘东, 等. 精密表面疵病检测美标数字化评价实现算法[J]. 应用光学, 2015, 36(2): 266-271.

    Xie Shibin, Yang Yongying, Liu Dong, et al. Digital evaluation algorithm of American standard in defects inspection of precise surface[J]. Journal of Applied Optics, 2015, 36(2): 266-271.

[2] Gomez S, Hale K, Burrows J, et al. Measurements of surface defects on optical components[J]. Measurement Science and Technology, 1998, 9(4): 607-616.

[3] Miller P E, Suratwala T I, Bude J D, et al. Initiation of laser damage at surface imperfections on fused silica optics[C]. International Optical Design Conference and Optical Fabrication and Testing, 2010: OWA5.

[4] 焦兆阳, 张艳丽, 张军勇, 等. 终端靶场中相位畸变对近场光束质量的影响[J]. 中国激光, 2014, 41(5): 0502004.

    Jiao Zhaoyang, Zhang Yanli, Zhang Junyong, et al. Influence of phase distortion on near field beam quality in final target system[J]. Chinese J Lasers, 2014, 41(5): 0502004.

[5] 王威, 张磊, 冯素雅, 等. 采用显微荧光法研究掺钕磷酸盐激光玻璃的亚表面缺陷[J]. 中国激光, 2014, 41(9): 0906001.

    Wang Wei, Zhang Lei, Feng Suya, et al. Using fluorescent microscopy method to study subsurface defects in Nd-doped phosphate laser glasses[J]. Chinese J Lasers, 2014, 41(9): 0906001.

[6] 尤科伟, 张艳丽, 张雪洁, 等. 光学元件表面缺陷相对位置分布对近场光束质量的影响[J]. 中国激光, 2015, 42(3): 0308004.

    You Kewei, Zhang Yanli, Zhang Xuejie, et al. Influence of relative position of optical component surface defects on near filed beam quality[J]. Chinese J Lasers, 2015, 42(3): 0308004.

[7] 王世通, 杨甬英, 赵丽敏, 等. 光学元件表面缺陷散射光成像数值模拟研究[J]. 中国激光, 2015, 42(7): 0708005.

    Wang Shitong, Yang Yongying, Zhao Limin, et al. Numerical simulation research on scattering light imaging of surface defects of optical components[J]. Chinese J Lasers, 2015, 42(7): 0708005.

[8] Stolz C J. Status of NIF mirror technologies for completion of the NIF facility[C]. SPIE, 2008, 7101: 710115.

[9] Thompson C E, Knopp C F, Decker D E. Optics damageinspection for the NIF[C]. SPIE, 1999: 921-932.

[10] Baker L R. On-machine measurement of roughness, waviness, and flaws[C]. SPIE, 1990: 248-256.

[11] 王传珂, 况龙钰, 王哲斌, 等. 神光Ⅱ长脉冲三倍频激光受激Raman散射能量角分布测量[J]. 核聚变与等离子体物理, 2006, 26(4): 310-313.

    Wang Chuanke, Kuang Longyu, Wang Zhebin, et al. The stimulated Raman scattering from interaction of 351 nm laser light with hohlraum[J]. Nuclear Fusion and Plasma Physics, 2006, 26(4): 310-313.

[12] Mascio L N, Logan C M, Martz H E. Automated defect detection for large laser optics[J]. Engineering Reseach, Development and Technology, 1997: 25-30.

[13] 李艾星, 杨天饴, 张颖. 基于机器视觉的精密光学元件表面疵病识别初步研究[J]. 重庆邮电大学学报(自然科学版), 2007, 19(4): 442-445.

    Li Aixing, Yang Tianyi, Zhang Ying. Preliminary research of surface defect recognition based on machine vision[J]. Journal of Chongqing University of Posts and Telecommunications (Natural Science), 2007, 19(4): 442-445.

[14] 范勇, 陈念年, 高玲玲, 等. 大口径精密表面疵病的数字化检测系统[J]. 强激光与粒子束, 2009, 21(7): 1032-1036.

    Fan Yong, Chen Niannian, Gao Lingling, et al. Digital detection system of surface defects for large aperture optical elements[J]. High Power Laser and Particle Beams, 2009, 21(7): 1032-1036.

[15] 杨甬英, 陆春华, 梁蛟, 等. 光学元件表面缺陷的显微散射暗场成像及数字化评价系统[J]. 光学学报, 2007, 27(6): 1031-1038.

    Yang Yongying, Lu Chunhua, Liang Jiao, et al. Microscopic dark-field scattering imaging and digitalization evaluation system of defects on optical devices precision surface[J]. Acta Optica Sinica, 2007, 27(6): 1031-1038.

[16] 胡敏, 李梅, 汪荣贵. 改进的Otsu算法在图像分割中的应用[J]. 电子测量与仪器学报, 2010, 24(5): 443-449.

    Hu Min, Li Mei, Wang Ronggui. Application of an improved Otsu method in image segmentation[J]. Journal of Electronic Measurement and Instrument, 2010, 24(5): 443-449.

[17] Otsu N. A threshold selection method from gray-level Histograms[J]. IEEE Transactions on Systems, Man, and Cybernetics, 1979, 9(1): 62-66.

[18] 王海虹, 曾妮, 陆威, 等. 基于小波变换和数学形态学的激光成像雷达图像边缘检测[J]. 中国激光, 2008, 35(6): 903-906.

    Wang Haihong, Zeng Ni, Lu Wei, et al. Edge detection of laser imaging radar based on wavelet transform and mathematical morphology[J]. Chinese J Lasers, 2008, 35(6): 903-906.

[19] 朱珂汉, 杨鸣, 蒋金涛. 显微镜透射光照不均匀图像校正方法[J]. 计算机应用, 2013, 33(S1): 190-192.

    Zhu Kehan, Yang Ming, Jiang Jintao. Correction method for microscope transmittance uneven illumination images[J]. Journal of Computer Applications, 2013, 33(S1): 190-192.

[20] 赵文达, 续志军, 赵建, 等. 基于梯度直方图变换增强红外图像的细节[J]. 光学 精密工程, 2014, 22(7): 1962-1968.

    Zhao Wenda, Xu Zhijun, Zhao Jian, et al. Enhancement of infrared image details based on gradient histogram transform[J]. Optics and Precision Engineering, 2014, 22(7): 1962-1968.

[21] 朱聪, 于广婷, 李柏林, 等. 一种新的精密光学镜片表面疵病宽度测量方法[J]. 计算机应用与软件, 2014, 31(12): 259-261, 286.

    Zhu Cong, Yu Guangting, Li Bailin, et al. A new algorithm for measuring defects width on precise optics lens surface[J]. Computer Applications and Software, 2014, 31(12): 259-261, 286.

[22] Tamayo P, Slonim D, Mesirov J, et al. Interpreting patterns of gene expression with self-organizing maps: Methods and application to hematopoietic differentiation[J]. Proceedings of the National Academy of Sciences, 1999, 96(6): 2907-2912.

[23] 崔辉, 刘世杰, 赵元安, 等. 全内反射显微技术探测亚表面缺陷新方法研究[J]. 光学学报, 2014, 34(6): 0612004.

    Cui hui, Liu Shijie, Zhao Yuan′an, et al. Study on total internal reflection microscopy for subsurface damage[J]. Acta Optica Sinica, 2014, 34(6): 0612004.

[24] Du Q L, Lan X S, Yuan L, et al. An optical imaging simulation method for inverted microscope and its application in automatic cell manipulation[J]. Advanced Materials Research, 2012, 490: 1981-1985.

张博, 倪开灶, 王林军, 刘世杰*, 吴伦哲. 基于背景校正和图像分割定量分析光学元件表面疵病的新算法[J]. 光学学报, 2016, 36(9): 0911004. Zhang Bo, Ni Kaizao, Wang Linjun, Liu Shijie, Wu Lunzhe. New Algorithm of Detecting Optical Surface Imperfection Based on Background Correction and Image Segmentation[J]. Acta Optica Sinica, 2016, 36(9): 0911004.

本文已被 7 篇论文引用
被引统计数据来源于中国光学期刊网
引用该论文: TXT   |   EndNote

相关论文

加载中...

关于本站 Cookie 的使用提示

中国光学期刊网使用基于 cookie 的技术来更好地为您提供各项服务,点击此处了解我们的隐私策略。 如您需继续使用本网站,请您授权我们使用本地 cookie 来保存部分信息。
全站搜索
您最值得信赖的光电行业旗舰网络服务平台!