椭圆偏振光谱中的主角测量条件分析

赵海斌; 夏国强; 陈岳立; 李晶; 周仕明; 陈良尧

光学学报, 2001, 21 (6): 734, 网络出版: 2006-08-10

椭圆偏振光谱中的主角测量条件分析

Analysis of Measuring Condition for Principle Angle in Spectroscopic Ellipsometry

论文大纲

赵海斌夏国强陈岳立李晶周仕明陈良尧

作者单位

复旦大学物理系,上海 200433

光谱学椭偏光谱主角布儒斯特角 spectroscopy spectroscopic ellipsometry principle angle Brewster’s angle

摘要

对椭圆偏振光谱中的主角测量条件进行了分析。当入射角等于主角θp时，椭偏参数的相位为90°，据此给出了当材料的介电函数已知时对θp进行数值和解析计算的公式和方法，并可相应地计算出椭偏参数的幅值ρp0。在θp入射角下测量可获得较高的数据精度。主角条件下椭偏参数ρp0及其相位Δp的实验测量结果与计算值符合得很好。本工作给出的计算公式和方法可在其他光谱实验中获得应用。

Abstract

The measuring condition for principle angle in spectroscopic ellipsometry is analyzed. As the incident angle is equal to principle angle θ p, the phase angle of ellipsometry parameters is 90°. It gives a way to obtain θ p from numerical calculation and analytic equation as the dielectric function of the material is known, and the amplitude ρ p0 of ellipsometry parameters can be calculated accordingly. Higher precision of data can be acquired as measuring at incident angle of θ p. The experimental results of Δ p and ρ p0 correspond very well with the calculated ones. The calculation formulas and methods given in this work can be applied to other spectroscopic experiments.

参考文献

[1] Aspnes D E. Fourier transform detection system for rotating-analyzer ellipsometers. Opt. Commun., 1973, 8(3):222～225

[2] Aspnes D E, Studua A A. High precision scanning ellipsometer. Appl. Opt., 1975, 14(1):220～228

[3] Aspnes D E. Spectroscopic ellipsometry of solids. In Seraphin B O eds., Optical Properties of Solids-New Developments. Amsterdam: North-Holland, 1976. 799～846

[4] Zaghloul A-R M, Azzam R M. Single-element rotating-polarizer ellipsometer: PSI meter. Surf. Sci., 1980, 96(1):168～173

[5] Chen L Y, Lynch D W. Scanning ellipsometer by rotating polarizer and analyzer. Appl. Opt., 1987, 26(24):5221～5228

[6] Woollam J A, Snyder P G, Rost M C. Variable angle spectroscopic ellipsometry: a nondestructive characterization technique for ultrathin and mutilayter materials. Thin Solid Films, 1988, 166(1):317～323

[7] Jellison G E, Modine F A. Two-channel polarization modulation ellipsometer. Appl. Opt., 1990, 29(7):959～974

[8] Klein M V, Furtak T E. Optics. 2nd Edit. New York: John Wiley & Sons Inc., 1986. 59～127

[9] Chen L Y, Feng X W, Su Y et al.. Design of a scanning ellipsomter by synchronous rotation of the polarizer and analyzer. Appl. Opt., 1994, 33(7):1299～1305

赵海斌, 夏国强, 陈岳立, 李晶, 周仕明, 陈良尧. 椭圆偏振光谱中的主角测量条件分析[J]. 光学学报, 2001, 21(6): 734. 赵海斌, 夏国强, 陈岳立, 李晶, 周仕明, 陈良尧. Analysis of Measuring Condition for Principle Angle in Spectroscopic Ellipsometry[J]. Acta Optica Sinica, 2001, 21(6): 734.

椭圆偏振光谱中的主角测量条件分析

关于本站 Cookie 的使用提示

全站搜索

椭圆偏振光谱中的主角测量条件分析

相关论文

相关资讯

关于本站 Cookie 的使用提示

全站搜索