热处理对ZnO/Au薄膜结构和压电特性的影响
杨杰, 陈光焱, 王旭光, 沈朝阳, 姚明秋. 热处理对ZnO/Au薄膜结构和压电特性的影响[J]. 强激光与粒子束, 2015, 27(2): 024133.
Yang Jie, Chen Guangyan, Wang Xuguang, Shen Zhaoyang, Yao Mingqiu. Effect of post-annealing on the structure and piezoelectric properties of ZnO/Au films[J]. High Power Laser and Particle Beams, 2015, 27(2): 024133.
[1] Joshi S, Parmar M, Rajanna K. A novel gas flow sensing application using piezoelectric ZnO thin films deposited on Phynox alloy[J]. Sensors and Actuators A: Physical, 2012, 187: 194-200.
[4] Wang X B, Song C, Li D M, et al. The influence of different doping elements on microstructure, piezoelectric coefficient and resistivity of sputtered ZnO film[J].Applied Surface Science, 2006, 253: 1639-1643.
[5] Ndong R O, Sorli B, Giani A, et al. Film bulk acoustic resonator based on zinc oxide thin film[J].Advances in Physics Theories and Applications, 2013, 23: 31-35.
[6] Yuan Y, Shyong C K, Du H,et al. A ZnO thin-film driven microcantilever for nanoscale actuation and sensing[J].International Journal of Smart and Nano Materials, 2013, 4: 128-141.
[7] Yoshino Y,Inoue K, Takeuchi M, et al. Effects of interface micro structure in crystallization of ZnO thin films prepared by radio frequency sputtering[J].Vacuum, 1998, 51: 601-607.
[8] Yoshino Y. Piezoelectric thin films and their applications for electronics[J]. Journal of Applied Physics, 2009, 105: 061623.
[9] Jung M, Lee J, Park S, et al. Investigation of the annealing effects on the structural and optical properties of sputtered ZnO thin films[J].Journal of crystal growth, 2005, 283: 384-389.
[10] Wu Lili, Wu Youshi, Pan Xiaoru, et al. Synthesis of ZnO nanorod and the annealing effect on its photoluminescence property[J].Optical Materials, 2006, 28: 418-422.
[12] Cui M L, Wu X M, Zhuge L J, et al. Effects of annealing temperature on the structure and photoluminescence properties of ZnO films[J].Vacuum, 2007, 81: 899-903.
[13] Lee Y C, Hu S Y, Water W, et al. Rapid thermal annealing effects on the structural and optical properties of ZnO films deposited on Si substrates[J].Journal of Luminescence, 2009, 129: 148-152.
杨杰, 陈光焱, 王旭光, 沈朝阳, 姚明秋. 热处理对ZnO/Au薄膜结构和压电特性的影响[J]. 强激光与粒子束, 2015, 27(2): 024133. Yang Jie, Chen Guangyan, Wang Xuguang, Shen Zhaoyang, Yao Mingqiu. Effect of post-annealing on the structure and piezoelectric properties of ZnO/Au films[J]. High Power Laser and Particle Beams, 2015, 27(2): 024133.