光学学报, 1991, 11 (7): 665, 网络出版: 2007-11-12
各向异性表面的椭偏测量的消光过程
Nulling procedures used in the ellipsometry for anisotropic surface
摘要
本文描述了在正向入射条件下,当待测的各向异性反射面(如全息光栅)的两个笛卡儿本征矢方向与系统的指向有微小偏离时,椭偏测量的消光过程由理想的两步过程转变成多步过程。文中同时定量指出该偏离所造成的影响及应用。
Abstract
This paper describes the nulling procedures used in the ellipsometry for anisotro pic surface (e.g., holographic grating) transformed into multi-step regulations from ideal two-step ones, if the orientation of two cartesian eigenvectors of the sample surface deviate a small angle from that of ellipsometer. The influence of this devation and its application are also discussed.
参考文献
梁民基. 各向异性表面的椭偏测量的消光过程[J]. 光学学报, 1991, 11(7): 665. 梁民基. Nulling procedures used in the ellipsometry for anisotropic surface[J]. Acta Optica Sinica, 1991, 11(7): 665.