大气压微波等离子体炬的仿真设计与实验

张庆; 张贵新; 王黎明; 王淑敏

doi:doi:10.3788/hplpb20102202.0315

强激光与粒子束, 2010, 22 (2): 315, 网络出版: 2010-05-28

大气压微波等离子体炬的仿真设计与实验

Design and experiment of an atmospheric pressure microwave plasma torch

论文大纲

张庆 ^*张贵新王黎明王淑敏

作者单位

清华大学电机工程与应用电子技术系,北京 100084

微波等离子体炬矩形波导大气压开放式运行 microwave plasma torch rectangular waveguide atmospheric pressure open-air operation

摘要

设计了一个低成本、高稳定性的基于BJ22矩形波导的微波等离子体炬源。整个系统由1-10 kW主频2.45 GHz的磁控管微波功率源、环形器、调谐器和微波反应腔体组成。通过特殊设计的调谐装置，在气体喷嘴处产生高幅值的电场强度，使工作气体电离形成大气压开放式微波等离子体炬。对影响电场强度的几个关键因素进行了仿真，得出各个参数对场强的影响规律;根据仿真参数设计了微波反应腔体，该系统可以在大气压下激发和维持开放的稳定氩气、氦气、氮气和空气等离子体炬。对等离子体炬的基本特性和基本参数进行了研究，验证了设计参数的正确性，讨论了其可扩展性及潜在的工业应用。

Abstract

A low-cost and high-stability microwave plasma torch source based on BJ22 rectangular waveguide was developed,which is supplied by the (2.45±0.05) GHz frequency microwave source. The entire system consists of a 1~10 kW magnetron power supply,a circulator,a tuning section and a waveguide resonator. Atmospheric open microwave plasma was produced by the interaction of the work gas and the high electrical field,which was generated between the gas nozzle and the waveguide aperture by specific tuning structure. Several key factors were simulated to get the effect of key factors on electric field strength and then the microwave resonator was designed. A variety of gases were used to produce the plasma including argon,helium,nitrogen and air. In this paper,the basic characteristics of the plasma torch is investigated to verify the correctness of the design parameters and potential indusrtial applications is discussed.

参考文献

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张庆, 张贵新, 王黎明, 王淑敏. 大气压微波等离子体炬的仿真设计与实验[J]. 强激光与粒子束, 2010, 22(2): 315. Zhang Qing, Zhang Guixin, Wang Liming, Wang Shumin. Design and experiment of an atmospheric pressure microwave plasma torch[J]. High Power Laser and Particle Beams, 2010, 22(2): 315.

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