光学学报, 1990, 10 (4): 316, 网络出版: 2007-11-12
激光诱导荧光方法对SiH4N2混合气体放电等离子体的研究
The study of SiH4N2gas discharge plasma with LIF
摘要
用激光诱导荧光方法对SiH4/N2混合气体射频放电等离子体进行了研究,实验上首次检测到SiH4分子射频放电离解过程的中间产物Si2.
Abstract
Mixed SiH4/N2 gas radio-frequency (RF) discharge plasma has been studied with laserr induced fluorescence (LIF). The intermediate species Si2 has been detected, and detection of Si2 in SiH4 RF discharge decomposition has not been reparted before.
参考文献
吴嘉达, 伍长征, 李富铭. 激光诱导荧光方法对SiH4N2混合气体放电等离子体的研究[J]. 光学学报, 1990, 10(4): 316. 吴嘉达, 伍长征, 李富铭. The study of SiH4N2gas discharge plasma with LIF[J]. Acta Optica Sinica, 1990, 10(4): 316.
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