基于AlN的MEMS变形镜仿真及驱动性能研究 下载: 709次
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邵健, 李琦, 余洪斌. 基于AlN的MEMS变形镜仿真及驱动性能研究[J]. 激光与光电子学进展, 2018, 55(8): 082204. Shao Jian, Li Qi, Yu Hongbin. Simulation and Driving Performance of AlN-Based MEMS Deformable Mirror[J]. Laser & Optoelectronics Progress, 2018, 55(8): 082204.