中国激光, 2013, 40 (10): 1005007, 网络出版: 2013-09-17   

基于MEMS膜片的光纤声传感器分析

Analysis of Optical Fiber Acoustic Transducer with a MEMS Membrane
作者单位
海军工程大学电子工程学院, 湖北 武汉 430033
摘要
提出了一种新的应用于低频声传感领域的强度调制型光纤传感器理论模型。该模型使用了单模光纤来传输和接收光信号,使用了C-lens光学透镜实现光准直作用,讨论了光在准直透镜中的传播规律,利用准直器耦合损耗相对角度变化最为敏感的特征实现光强调制。强度型光纤传感器采用微电机系统(MEMS)结构的压力振动膜片拾取振动位移,通过分析施加在膜片上压力的变化得到影响光纤低频声传感器灵敏度的相关参数。仿真结果表明,选择合适的参数可以使传感器的灵敏度较传统方法有量级的提高,实验结果也说明了理论建模的可行性。
Abstract
To be used in sound sensor field, a new intensity modulated optic microphone theory is introduced. Here single-mode optical fiber and single fiber C-lens are used to realize light intensity modulation; the system also contains micro-electro-mechanical system (MEMS) membrane to be compatible with vibration displacement. Simulation results show that the proper choice of parameters like membrane size can make the sensitivity of sensor improve in orders of magnitude than traditional light intensity modulation methods, and the experimental results also show that the theoretical simulation is persuasive.
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李晓龙, 王江安, 宗思光. 基于MEMS膜片的光纤声传感器分析[J]. 中国激光, 2013, 40(10): 1005007. Li Xiaolong, Wang Jiang′an, Zong Siguang. Analysis of Optical Fiber Acoustic Transducer with a MEMS Membrane[J]. Chinese Journal of Lasers, 2013, 40(10): 1005007.

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