基于弛豫铁电单晶的热释电焦平面研究

邵秀梅; 马学亮; 于月华; 方家熊

光电工程, 2011, 38 (2): 46, 网络出版: 2011-02-28

基于弛豫铁电单晶的热释电焦平面研究

Pyroelectric Arrays with Relax-based Ferroelectric Single Crystals

论文大纲

邵秀梅 ^1,2,*马学亮 ¹于月华 ¹方家熊 ^1,2

作者单位

¹ 中国科学院上海技术物理研究所传感技术国家重点实验室，上海 200083

² 中国科学院红外成像材料与器件重点实验室，上海 200083

焦平面热释电 PMN-PT 单晶非制冷 FPA pyroelectric PMN-PT single crystals uncooled

摘要

PMN-PT 是一种综合性能优异的新型热释电材料。本文以PMN-PT 单晶作为热释电探测器材料，开展了8×1线列探测器的芯片结构设计及器件关键工艺研究，获得了8 元热释电探测器芯片，电压响应率约280 V/W。同时，实现了8 元热释电光敏芯片与8 元读出电路的耦合互连，得到了8 元热释电焦平面原型器件，并进行了性能测试。由于读出电路对可见光存在响应，影响了焦平面模块的热释电信号提取，电路设计有待改进。本文的研究为基于新型弛豫铁电单晶的大规模非制冷焦平面的研制奠定了一定的基础。

Abstract

PMN-PT single crystal is a novel pyroelectric material with superior performances. An 8×1 linear array was designed, and research on the key processes of device fabrication was carried out based on PMN-PT crystal. The responsivity of the 8×1 chip was about 280 V/W. At the same time, the 8×1 pyroelectric chip was coupled with an 8×1 read-out circuit. The performance of the 8×1 FPA was studied. The pyroelectric signal of the FPA device can’t be measured because the read-out circuits respond to visible light. The design of read-out circuits needs to be improved. The results of the paper lay a foundation for the development of large-scale uncooled pyroelectric FPA based on novel ferroelectric single crystals.

参考文献

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邵秀梅, 马学亮, 于月华, 方家熊. 基于弛豫铁电单晶的热释电焦平面研究[J]. 光电工程, 2011, 38(2): 46. SHAO Xiu-mei, MA Xue-liang, YU Yue-hua, FANG Jia-xiong. Pyroelectric Arrays with Relax-based Ferroelectric Single Crystals[J]. Opto-Electronic Engineering, 2011, 38(2): 46.

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