中国激光, 1991, 18 (2): 100, 网络出版: 2007-11-12
在玻璃衬底上制作K+离子交换掩埋波导的新工艺
A new fabrication technology of K+-ion exchange buried waveguides on glass substrates
摘要
本文报道用不同离子两步交换技术,在玻璃衬底上制作K+离子交换掩埋波导的新工艺,它不要求施加外电场。用X射线能谱(XES)分析技术测试了K+离子的浓度分布,证明所制出的样品是掩埋波导。
Abstract
A new fabrication technology of K+-ion exchange buried waveguides in glass substrates is presented for the first time, which includes two-step ion exchange processes in different chemicals. The processes are simple, feasible and unnecessary to apply electric field. X-ray energy spectrometry analyses show the guides are buried ones.
参考文献
陈铮, 刘文育. 在玻璃衬底上制作K+离子交换掩埋波导的新工艺[J]. 中国激光, 1991, 18(2): 100. 陈铮, 刘文育. A new fabrication technology of K+-ion exchange buried waveguides on glass substrates[J]. Chinese Journal of Lasers, 1991, 18(2): 100.
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