中国激光, 1985, 12 (8): 492, 网络出版: 2012-11-06
材料表面温度的激光喇曼测量法
Measurement of local solid temperature by laser Raman spectroscopy
摘要
用激光喇曼光谱仪测量样品的斯托克斯和反斯托克斯散射线的相对光强之比.可以得到样品表面的局部温度.温度数值直接由导出公式计算而得,无需定标.它特别适用于表面物理和集成电路新工艺开发研究.文中还就该方法的误差进行了讨论和实验修正.
Abstract
Local temperature of solid surface can be obtained by the intonsity ratio between Stokes Bumnn scattering and anti-Stokcs Banian scattering from samples. It is a real time temperature measurement without touching the object. It needs no calibration, but derives from spectroscopic measurement. It meets the requirements of surface physics and new technology development of VLSI. A steady state measurement using a low power laser has been achieved. The analysis and correction of its errors are given.
郁曾期, 胡英, 杜元成, 郑思定, C. A. Moore, G. J. Collins. 材料表面温度的激光喇曼测量法[J]. 中国激光, 1985, 12(8): 492. 郁曾期, 胡英, 杜元成, 郑思定, C. A. Moore, G. J. Collins. Measurement of local solid temperature by laser Raman spectroscopy[J]. Chinese Journal of Lasers, 1985, 12(8): 492.
PDF全文
