研制了一种针对半导体器件的温度控制系统, 不仅可用于对内置热电制冷器的半导体器件的温度控制, 同时实现了在宽环境温度范围内对无热电制冷器及热敏电阻的半导体器件的温度控制.系统硬件主要由两部分组成, 第一部分包括主控制器模块、温度采集模块和热电制冷器电流控制模块, 实现对内置热电制冷器的半导体器件的温度控制; 第二部分包括辅控制器模块、温度采集模块、金属氧化物场效应管开关电路模块及附加四级热电制冷器, 实现对无热电制冷器的半导体器件的温度控制.软件部分, 主辅控制器分别实时采集半导体器件的工作温度, 采用积分限幅式数字比例-积分-微分算法, 调整热电制冷器驱动器的电流实现恒定的温度控制.利用本文研制的温度控制系统对内置热电制冷器的半导体激光器的温度控制准确度为±0.01℃, 温度稳定性为0.004 8℃; 在无热电制冷器的半导体光源的温度控制实验中, -18℃、室温、40℃环境下的温控准确度分别为±0.05℃、±0.01℃、±0.02℃.利用研制的温控系统连续5 h测试了1.563 μm激光器的输出光谱, 峰值输出波长稳定; 采用1.653 μm激光器, 分别利用研制的温控系统和商用系统开展了甲烷气体检测实验, 与商用控制器相比, 本文研制的温控仪获得的系统检测下限更低.该系统具有体积小、成本低、便于集成、工作稳定可靠的优点, 在气体检测中有良好的应用前景.

A temperature control system for semiconductor devices is developed, which can be used for the temperature control of semiconductor devices with built-in thermoelectric cooler and of those without thermoelectric cooler and thermistor over a wide variation range of ambient temperature. The hardware part of the system is mainly composed of two parts. For the first part, a main controller module, a temperature acquisition module and a thermoelectric cooler current control module realize the temperature control of the semiconductor devices with built-in thermoelectric cooler. For the second part, an auxiliary controller module, a temperature acquisition module, a metal-oxide-semiconductor field-effect transistor switch circuit module and a thermoelectric cooler realize the temperature control of the semiconductor devices without built-in thermoelectric cooler. For the software, the real-time acquisition of the operating temperature of the semiconductor device is realized by the main and auxiliary controllers, and an integral-limited digital proportional-integral-derivative algorithm is used to adjust the current of the thermoelectric cooler driver to achieve a constant temperature control. Using the developed temperature control system, the temperature control accuracy of a semiconductor laser with a built-in TEC is ±0.01℃, and the temperature stability reaches 0.004 8℃. The temperature control experimental results of a semiconductor source without thermoelectric cooler show that the temperature control accuracy are ±0.05℃, ±0.01℃, ±0.02℃ at an ambient temperature of -18℃, room temperature and 40℃, respectively. The output spectrum of a 1.563 μm laser is measured continuously for 5 hours by the developed temperature controller, which generates a stable peak wavelength. With a 1.653 μm laser, methane detection experiments are carried out by using a temperature controller and the developed controller. A lower detection limit is achieved by the developed controller as compared with the results obtained by the commercial one. The system has the advantages of small size, low cost, easy integration, stable and reliable operation, and has good application prospects in infrared gas detection.