光学技术, 2013, 39 (3): 273, 网络出版: 2013-05-22   

利用光声效应研究ITO薄膜的光吸收率

Study on optical absorptivity of ITO thin film by photoacoustic effect
作者单位
1 西北师范大学 物理与电子工程学院 甘肃省原子分子物理与功能材料重点实验室, 兰州 730070
2 天水华天科技股份有限公司, 甘肃 天水 741000
3 中国科学院化学研究所, 北京 100190
摘要
利用基于压电效应的光声技术, 研究了ITO薄膜在可见光波段的吸收特性, 并与分光型光学薄膜分析系统NKD8000测得的数据进行了比较, 得到了一致性较好的结果。实验证实: 在可见光波段, 该ITO薄膜的吸收率随波长呈非线性变化, 在450nm附近吸收最强, 随着波长的增加逐渐减小, 在514.7nm处接近于零, 之后又缓慢增大。
Abstract
Using the photoacoustic technology which is based on the piezoelectric effects, the optical absorption characteristic of ITO thin film is studied by piezoelectric photoacoustic (PZPA) technique in optical light. The results are in a good agreement with the data obtained by the CDIR thin film analysis system NKD8000. Experiments prove that the optical absorption rate of the ITO film non-linearly changes with the wavelength in the visible light range, nearby 450nm, the absorption is the strongest, and the absorption decrease gradually along with the increase of the wavelength, in 514.7nm place, it is close to zero, then increase slowly.
参考文献

[1] 王新峰, 吴次南, 周章渝, 等.光声光谱技术中斩光频率对光声信号影响的研究[J].贵州大学学报(自然科学版), 2007, 24(4): 360-362.

    Wang X F, Wu C N, Zhou Z Y, et al. In the photoacoustic spectrum technology modulation frequency to the photoacoustic signal influence research[J].Journal of Guizhou University (Natural Sciences), 2007,24(4):360-362.

[2] 杜昌文, 周健民, 王火焰, 等.土壤的中红外光声光谱研究, [J]光谱学与光谱分析.2008, 28(6): 1242.

    Du C W, Zhou J M, Wang H Y, et al. Study on the soil mid-infrared photoacoustic spectroscopy[J].Spectroscopy and Spectral Analysis,2008,28(6):1242.

[3] Holotta M, Grossauer H, Kremser C, et al.. Photoacoustic tomography of pathological tissue in ex-vivo mouse hearts [J].SPIE Digital Library,2010,(7564):75642X.

[4] Malkin S, Churio M S, Shochat S, etal. Photochemical energy storage and volume changes in the microsecond time range in bacterial photosynthesis-a laser induced optoacoustic study[J].Photochemistry and Photobiology B: Biology, 1994, 23(1):79-85

[5] Reising H, Schreiber U. Pulse-modulates photoacoustic measurements reveal strong gas-up take component at high CO2-concentrations[J]. Photosynthesis Research, 1992, 31 (3): 227-238

[6] 万巍, 唐志列, 等.光声光谱技术在测量光谱响应特性方面的应用[J].光学技术, 2005, 31(6): 858-860.

    Wai W,Tang Z L, Liang R S, et al. Application of photoacoustic spectroscopy for measuring spectral response[J]. Optical Technique, 2005, 31(6): 858-860.

[7] Rivas J G, Sprik R. Broadband photoacoustic spectroscopy using a free-electron laser[J].Rev.Sci. Instrum,2004,75(1): 281-283.

[8] 李秀, 杨富.几种光学薄膜弱吸收测量技术研究进展[J].河北北方学院学报(自然科学版), 2009, 25(4): 10-13.

    Li X, Yang F, et al. Several optical film weak absorption Sensing Technique [J]. Journal of Hebei North University (Natural Science Edition), 2009, 25 (4):10-13.

[9] 乔明霞.薄膜光学常数和厚度的透射光谱法测定研究[D].成都:四川大学电子信息学院, 2005.

    Qiao M X. Study on determination of optical constants and thickness of thin films by transmission spectrum method [D]. Chengdu: College of Electronics and Information Engineering,2005.

[10] 唐晋发, 顾培夫.薄膜光学与技术[M].北京:机械工业出版社, 1989:221-223.

    Tang J F, Gu P F. Thin film optics and technology[M]. Beijing: China Machine Press,1989:221-223.

[11] 张进兵.Sr2TiO4透明导电薄膜制备及光电性能研究[D].西安:西北大学信息科学与技术学院, 2011.

    Zhang J B. Study of preparation and photoelectric properties of Sr2TiO4trans parent conduetive thin films[D].XiˊAn: Northwest University School of Information Technology, 2011.

[12] Butler I S, Xu Z H. FT-IR, photoacoustic and micro-Raman spectra of the dodecacarbonyltriruthenium (O) complexes Ru3(13CO)12 and Ru3(CO)12 [J]. Journal of Raman Spectroscopy, 1987, 18(5): 357-363.

[13] 殷庆瑞, 王通, 钱梦录.光声光热技术及其应用[M].第一版,北京:科学出版社, 1991, 372-374.

    Yin Q R, Wang T, Qian M L. Solar thermal technology and its applications in photoacoustic[M]. The first edition, Beijing: Science Press, 1991,372-374.

[14] Astrath N G C, Bento A C, Baesso M L, et al. Photoa- coustic spectroscopy to determine the optical properties of thin film 4H-SiC [J].Thin Solid Films, 2006,515(4): 2821-2823.

[15] 王培吉, 周忠祥, 梁伟,等.利用激光光声技术测量薄膜材料的热扩散率[J].激光杂志, 2006, 27(2): 24-25.

    Wang P J, Zhou Z X, Liang W, et al. The measuring thermal diffusivity of film materials by laser photoacoustic backing exciting technique[J]. Laser Journal,2006,27(2):24-25.

[16] 何小虎, 韦莉.铟锡氧化物及其应用[J].稀有金属与硬质合金, 2003, 31(4), 51-57.

    He X H ,Wei L. In-Tin Oxide and its applications[J]. Rare Metals and Cemented Carbides, 2003, 31(4), 51-57.

[17] 李天璘.ITO薄膜的光学性质及其测量[D].北京:北京工业大学, 2009.

    Li T L. The optical properties of ITO thin film and its measurement[D]. BeiJing: Beijing University of Technology, 2009.

[18] 王敏, 蒙继龙, 陈明光.ITO薄膜的光学性能研究[J].中国表面工程, 2003, 62(5): 27-32.

    Wang M, Meng J L,Chen M G, et al. Optical properties of ITO films[J].China Surface Engineering, 2003, 62(5): 27-32.

[19] Rosencwaig A, Gersho A. Theory of the photoacoustic effect with solids[J]. J.Appl.Phys.,1976,47(1),64-69.

[20] 靳刚, 白双萼, 夏陆华, 等.光声光谱法研究光学薄膜的吸收特性[J] .光学学报, 1988, 8(7): 643-647.

    Jin G, Bai S E,Xia L H, et al. Photoacoustic study on spectral absorption of optical films[J]. Acta Optical Sinica 1988,8(7):643-647.

[21] 张硕, 袁萍, 杨景发, 等.利用压电光声光谱测量镁掺杂氧化锌薄膜的光吸收特性[J] .光谱实验室, 2011, (3): 1475-1479.

    Zhang S, Yuan P, Yang J F, et al. Optical absorption of Mg-ZnO thin films measured by piezoelectric photoacoustic technique[J]. Chinese Journal of Spectroscopy Laboratory, 2011,(3): 1475-1479.

[22] 邓邹生.玻璃光吸收系数测量[J]. 硅酸盐学报, 1982, 10(2): 231-236.

    Deng Z S. Measurement of the absorpption coefficient of optical glass[J]. Journal of Chinese Ceramics Society, 1982,10(2):231-236.

[23] 胡斌.稀土固态配合物的光声位相分析及新型光声池研究[D].武汉:中国科技大学化学与材料科学学院, 2006.

    Hu B. Photoacoustic phase analysis of rare-earth solid complexes and new photoacoustic cell [D].Wuhan:School of Chemistry and Materials Science,USTC,2006.

[24] Musat V, Teixeira B, Fortunato E, et al. Al-doped ZnO thin films by sol-gel method [J].Surf. Coatings Technol, 2004,(3): 659-662.

[25] Fox M. Optical Properties of Solids[M]. The first edition. BeiJing: Science Press, 2009:40-41.

郭文娟, 袁萍, 张进兵, 张硕. 利用光声效应研究ITO薄膜的光吸收率[J]. 光学技术, 2013, 39(3): 273. GUO Wenjuan, YUAN Ping, ZHANG Jinbing, ZHANG Shuo. Study on optical absorptivity of ITO thin film by photoacoustic effect[J]. Optical Technique, 2013, 39(3): 273.

本文已被 1 篇论文引用
被引统计数据来源于中国光学期刊网
引用该论文: TXT   |   EndNote

相关论文

加载中...

关于本站 Cookie 的使用提示

中国光学期刊网使用基于 cookie 的技术来更好地为您提供各项服务,点击此处了解我们的隐私策略。 如您需继续使用本网站,请您授权我们使用本地 cookie 来保存部分信息。
全站搜索
您最值得信赖的光电行业旗舰网络服务平台!