Cu<sup>2+</sup>离子注入的石英光波导的特性研究

刘秀红; 韩海燕; 朱巧芬; 黄艳宾; 董昭

doi:doi:10.3788/gzxb20174604.0413001

光子学报, 2017, 46 (4): 0413001, 网络出版: 2017-05-03

Cu²⁺离子注入的石英光波导的特性研究

Properties of Waveguide in Fused Silica and Quartz Crystal Fabricated by Cu²⁺ Ion Implantation

论文大纲

刘秀红 ^*韩海燕朱巧芬黄艳宾董昭

作者单位

河北工程大学数理科学与工程学院, 河北邯郸 056038

集成光学光波导结构离子注入熔融石英石英晶体 Integrated optics Waveguide Implantation Fused silica Quartz crystal

摘要

利用Cu2+离子注入的方式在熔融石英和石英晶体上分别制备了平面光波导结构.通过棱镜耦合实验测试了两种光波导的导模特性, 结果表明：在同样的注入条件下熔融石英上形成了增加型的光波导结构, 而石英晶体上形成了位垒型的光波导结构.研究了退火温度对两种光波导导模折射率的影响, 熔融石英光波导中导模的折射率随着退火温度的升高而降低, 而石英晶体光波导中导模的折射率随着退火温度的升高先增加后降低.为了进一步分析离子注入两种材料形成光波导的微观机理, 利用SRIM模拟了Cu2+离子注入两种材料的电子能量损失和核能量损失, 并且模拟了两种光波导结构的折射率分布.模拟结果表明：熔融石英光波导的主要形成原因是离子注入表面的折射率大于其体材料的折射率, 而石英晶体光波导的主要形成原因是离子射程末端的折射率小于其体材料的折射率.因此, 在熔融石英光波导的形成中电子能量损失起主要作用, 而在石英晶体光波导的形成中核能量损失起主要作用.

Abstract

Planar waveguides were fabricated in fused silica and quartz crystal by Cu2+ ion implantation respectively. The guiding mode property was investigated in two types of waveguides by the prism-coupling method. The results indicate that an enhance-type waveguide formed in fused silica, while a barrier-type waveguide formed in quartz crystal by the same ion implantation. The anealing effects to the effective refractive indices of guiding modes in two types of waveguides were researched. The effective refractive indices of the guiding modes in fused silica decrease with the increase of annealing temperature. However, in quartz crystal the effective refractive indices of the guiding modes increase firstly and then decrease with the increase of annealing temperature. In order to investigate the formation mechanism of two kinds of waveguide, the distribution of the electronic and nuclear energy deposition in fused silica and quartz crystal were simulated using the SRIM code. In addition, the refractive index profiles of the types of waveguide were reconstructed. The simulation results show that in fused silica the main reason of the waveguide formation is that the refractive index in the near-surface region is larger than the substrate. However, in quartz crystal waveguide the major formation reason is that the refractive index at the end of ion track is less than the substrate region. Therefore, the electronic energy damage plays an important role for the formation of fused silica waveguide, while nuclear energy deposition is the dominant factor in the quartz crystal waveguide.

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刘秀红, 韩海燕, 朱巧芬, 黄艳宾, 董昭. Cu²⁺离子注入的石英光波导的特性研究[J]. 光子学报, 2017, 46(4): 0413001. LIU Xiu-hong, HAN Hai-yan, ZHU Qiao-fen, HUANG Yan-bin, DONG Zhao. Properties of Waveguide in Fused Silica and Quartz Crystal Fabricated by Cu²⁺ Ion Implantation[J]. ACTA PHOTONICA SINICA, 2017, 46(4): 0413001.

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