角多路准分子激光主振荡器功率放大系统光束定位误差分配

王大辉; 赵军; 赵学庆; 黄珂; 孙昱薇; 张永生; 郑国鑫; 胡云

doi:doi:10.3788/lop48.031401

激光与光电子学进展, 2011, 48 (3): 031401, 网络出版: 2011-01-04

角多路准分子激光主振荡器功率放大系统光束定位误差分配

Beam Positioning Error Budget of Angular Multiplexing Excimer Master Osillator Power-Amplifier Laser System

论文大纲

王大辉 ^1,*赵军 ¹赵学庆 ¹黄珂 ¹孙昱薇 ²张永生 ¹郑国鑫 ¹胡云 ¹

作者单位

¹ 西北核技术研究所激光与物质相互作用国家重点实验室, 陕西西安 710024

² 西北大学数学系, 陕西西安 710069

摘要

对角多路准分子激光主振荡器功率放大(MOPA)系统进行物像共轭结构简化。利用传输矩阵和光线追迹，推导出了像传递光路中光学元件扰动与相应像面光束定位误差之间关系式。根据九标度赋值矩阵，采用改进层次分析法确定指标权重系数，得到了影响系统稳定性的光学元件光束定位指标要求。结果表明，光学元件分配指标大小和像传递结构焦距、光学元件（反射镜）距离像传递结构物面距离有关，焦距越大指标越小，距离越远指标越大。测量了实验室环境下光学元件的稳定性，对测量结果和定位误差进行了分析，并在此基础上提出了光路设计和光路优化的建议。

Abstract

Angular multiplexing excimer master oscillator power-amplifier laser (MOPA) system is simplified by object-image conjugate structure. Relations between the drifts of optical components and the deviation of corresponding imaging plane are derived by transfer matrix and ray tracing. The index weight is determined by improved analytic hierarchy process according to nine scale evaluation matrix, and the beam positioning stability requirement of optical components which affects system stability is acquired. Results show that the error budget values of optical components is related to the focus of image-relaying and the distance from object plane. The values change conversely with the focuses. The optical components stability in laboratory environment is measured and compared with those of error budget.

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王大辉, 赵军, 赵学庆, 黄珂, 孙昱薇, 张永生, 郑国鑫, 胡云. 角多路准分子激光主振荡器功率放大系统光束定位误差分配[J]. 激光与光电子学进展, 2011, 48(3): 031401. Wang Dahui, Zhao Jun, Zhao Xueqing, Huang Ke, Sun Yuwei, Zhang Yongsheng, Zheng Guoxin, Hu Yun. Beam Positioning Error Budget of Angular Multiplexing Excimer Master Osillator Power-Amplifier Laser System[J]. Laser & Optoelectronics Progress, 2011, 48(3): 031401.

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