压电倾斜镜迟滞非线性建模及逆补偿控制

自适应光学系统中的压电倾斜镜通常是用来实时校正大气湍流引起的波前畸变，但压电倾斜镜的响应都有较大的非线性迟滞效应，大大降低了倾斜镜的到位精度，并且影响系统稳定性，制约了倾斜校正系统的带宽，因此需要对迟滞现象进行建模，通过建立的模型进行补偿。本文通过引入迟滞算子，使用贝叶斯正则化训练算法训练BP神经网络来构建压电倾斜镜迟滞模型，以中国科学院光电技术研究所自主研制的压电倾斜镜为对象开展了实验研究。最后的实验结果表明，通过BP神经网络构建的压电倾斜镜迟滞模型具有较准确的辨识能力，其中，X方向的迟滞大小由6.5%降低到了1.3%，Y方向的迟滞大小由7.1%降低到了1.6%。

Abstract

In the adaptive optics system, the piezoelectric steering mirror(tip/tilt mirror, TTM) is usually used to correct the wavefront aberration caused by atmospheric turbulence in real time. However, the response of the piezoelectric tilting mirror has large nonlinear hysteresis effect, which greatly reduces the precision of the tilting mirror in place, affects the stability of the system, and restricts the bandwidth of the skew correction system. Therefore, the hysteresis phenomenon needs to be modeled and compensated by the established model. In this paper, hysteresis operator is introduced and using Bayesian regularization training algorithm to train BP (back propagation) neural network to construct hysteresis model of piezoelectric steering mirror. Then experimental study was conducted on a piezoelectric steering mirror developed by Institute of Optics and Electronics, Chinese Academy of Sciences. The final experimental results show that the hysteresis model of piezoelectric steering mirror constructed by BP neural network has more accurate identification capability, the hysteresis size in the X direction decreased from 6.5% to 1.3% and that in the Y direction decreased from 7.1% to 1.6%.

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刘鑫, 李新阳, 杜睿. 压电倾斜镜迟滞非线性建模及逆补偿控制[J]. 光电工程, 2020, 47(4): 180654. Liu Xin, Li Xinyang, Du Rui. Modeling and inverse compensation control of hysteresis nonlinear characteristics of piezoelectric steering mirror[J]. Opto-Electronic Engineering, 2020, 47(4): 180654.

压电倾斜镜迟滞非线性建模及逆补偿控制

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