基于飞秒激光微加工的Pt-WO3膜光纤氢气传感器 
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Fiber Hydrogen Sensor Coated with Pt-WO3 Film Based on Femtosecond Laser Micro-processing
1 湖北文理学院机械工程学院, 湖北 襄阳 441053
2 武汉理工大学光纤传感技术国家工程实验室, 湖北 武汉 430070
图 & 表
图 1. 交叉螺旋微结构FBG。(a)加工示意图;(b)加工后的螺旋微结构的扫描式电子显微镜(SEM)照片
Fig. 1. Schematic of cross spiral micro-structured FBG. (a) Processing diagram; (b) SEM picture of spiral microstructure after processing
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图 2. Pt-WO3形貌和EDS测试。(a) SEM图像;(b) EDS测试结果
Fig. 2. SEM picture and EDS pattern of Pt-WO3. (a) SEM picture; (b) result of EDS
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图 3. 螺旋微结构和标准FBG探头的氢气响应曲线及拟合灵敏度曲线。(a)S-1在不同氢气浓度下的响应曲线;(b) S-1波长漂移量的线性拟合;(c)FBG-1在不同氢气浓度下的响应曲线;(d) FBG-1波长漂移量的线性拟合
Fig. 3. Response curves and fitting sensitivity curves of spiral microstructure and standard FBG probe. (a) Response curve of S-1 at different hydrogen concentrations; (b) linear fitting curve of wavelength drift of S-1; (c) response curve of FBG-1 at different hydrogen concentrations; (d) linear fitting curve of wavelength drift of FBG-1
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图 4. 波长漂移量对比。(a)微结构探头与标准FBG探头波长漂移量的对比;(b)标准FBG探头波长漂移量的实验值与仿真值对比
Fig. 4. Comparison of wavelength shifts. (a) Wavelength shifts of microstructred FBG probe and standard FBG probe; (b) experimental and simulation results of standard FBG probe
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表 1飞秒激光规格参数
Table1. Specification parameters of femtosecond laser
| Parameter | Pulsewidth /fs | Wavelength /nm | Average outputpower /W | Frequency /Hz | Diameter ofoutput beam /mm |
|---|
| Value | 180 | 780 | 1.1 | 1000 | 5 |
|
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表 2螺旋样品加工参数
Table2. Parameters of spiral microstructure processing
| Sample | Power /mW | Spiral pitch /μm |
|---|
| S-1 | 20 | 60 | | FBG-1 | 0 | 0 |
|
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表 3数值模拟温度与氢气体积分数关系
Table3. Numerical simulation of relationship between temperature and hydrogen volume fraction
| Temperature /℃ | Simulation results ofwavelength shift /pm | Experimental results ofstandard FBG /pm | Experimental resultof S-1 /pm | Hydrogen volumefraction /% |
|---|
| 212 | 1870 | 1536 | 2530 | 4 | | 200 | 1750 | 1339 | 2182 | 3.57 | | 180 | 1550 | 1064 | 1754 | 2.89 | | 160 | 1350 | 825 | 1383 | 2.30 | | 140 | 1150 | 525 | 917 | 1.56 | | 120 | 950 | 300 | 580 | 1.15 | | 100 | 750 | 218 | 440 | 0.80 | | 80 | 550 | 96 | 251 | 0.50 | | 60 | 270 | 22 | 112 | 0.28 | | 30 | 85 | 6 | 42 | 0.08 |
|
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周贤, 杨沫, 张文, 周飞, 戴玉堂. 基于飞秒激光微加工的Pt-WO3膜光纤氢气传感器[J]. 中国激光, 2019, 46(12): 1210001. Xian Zhou, Mo Yang, Wen Zhang, Fei Zhou, Yutang Dai. Fiber Hydrogen Sensor Coated with Pt-WO3 Film Based on Femtosecond Laser Micro-processing[J]. Chinese Journal of Lasers, 2019, 46(12): 1210001.
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