光学学报, 1988, 8 (8): 735, 网络出版: 2011-09-16
光学薄膜表面复型电子显微照片的计算机处理
Computer analysis of TEM micrographs of thin film surface replicas
摘要
用计算机处理薄膜表面复型电子显微照片,得到表面高度轮廓,提出了计算机定标方法,并计算了薄膜表面微结构参量.
Abstract
The thin-film surface topographs have been obtained with the computer analysis of micrographs of surface replicas. A new method of calibration with the aid of computer is given. The statistical properties of optical surfaces, such as r. m. s roughness, autocorrelation length and autocorrelation function are also calculated.
参考文献
吕中良, 唐晋发. 光学薄膜表面复型电子显微照片的计算机处理[J]. 光学学报, 1988, 8(8): 735. Lu ZHONgLIANG, TANS JINfA. Computer analysis of TEM micrographs of thin film surface replicas[J]. Acta Optica Sinica, 1988, 8(8): 735.
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