红外与激光工程, 2017, 46 (3): 0302001, 网络出版: 2017-06-27   

光学显微三维测量解耦合准则

3D measurement decoupling criterion in optical microscopy
作者单位
哈尔滨工业大学 超精密光电仪器工程研究所, 黑龙江 哈尔滨 150080
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刘俭, 谷康, 李梦周, 谭久彬. 光学显微三维测量解耦合准则[J]. 红外与激光工程, 2017, 46(3): 0302001.

Liu Jian, Gu Kang, Li Mengzhou, Tan Jiubin. 3D measurement decoupling criterion in optical microscopy[J]. Infrared and Laser Engineering, 2017, 46(3): 0302001.

参考文献

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刘俭, 谷康, 李梦周, 谭久彬. 光学显微三维测量解耦合准则[J]. 红外与激光工程, 2017, 46(3): 0302001. Liu Jian, Gu Kang, Li Mengzhou, Tan Jiubin. 3D measurement decoupling criterion in optical microscopy[J]. Infrared and Laser Engineering, 2017, 46(3): 0302001.

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