压电陶瓷装置微位移的光学测量与控制技术
高志山, 王若言, 成晓强. 压电陶瓷装置微位移的光学测量与控制技术[J]. 电光与控制, 2016, 23(8): 1.
GAO Zhi-shan, WANG Ruo-yan, CHENG Xiao-qiang. Optical Measurement and Control of Micro Displacement for A Piezoelectric Device[J]. Electronics Optics & Control, 2016, 23(8): 1.
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高志山, 王若言, 成晓强. 压电陶瓷装置微位移的光学测量与控制技术[J]. 电光与控制, 2016, 23(8): 1. GAO Zhi-shan, WANG Ruo-yan, CHENG Xiao-qiang. Optical Measurement and Control of Micro Displacement for A Piezoelectric Device[J]. Electronics Optics & Control, 2016, 23(8): 1.
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