光子学报, 2007, 36 (4): 686, 网络出版: 2007-09-17  

基于几何莫尔效应的剪应力传感器设计研究

Investigation of a Micro Shear Stress Sensor Using the Geometrical Moiré Effect
作者单位
西北工业大学,微/纳米系统实验室,西安,710072
引用该论文

刘奎, 苑伟政, 邓进军, 马炳和, 姜澄宇. 基于几何莫尔效应的剪应力传感器设计研究[J]. 光子学报, 2007, 36(4): 686.

刘奎, 苑伟政, 邓进军, 马炳和, 姜澄宇. Investigation of a Micro Shear Stress Sensor Using the Geometrical Moiré Effect[J]. ACTA PHOTONICA SINICA, 2007, 36(4): 686.

参考文献

[1] LIU C,HUANG J B,ZHU Z,et al.A micromachined flow shear-stress sensor based on thermal transfer principles[J].J MEMS,1999,8(1):90-99.

[2] . Design and calibration of a microfabricated floating-element shearstress sensor[J]. IEEE Tran on Elect, 1988, 35(6): 750-757.

[3] SHAJII J,NG K Y,SCHMIDT M A.A microfabricated floating-element shear stress sensor using wafer-bonding technology[J].J MEMS,1982,1(2):89-94.

[4] GOLDBERG H D,BREUER K S,SCHMIDT M A.A silicon wafer-bonding technology for microfabricatedshear-stress sensors with backside contacts[C].Solid-State Sensor and Actuator Workshop,Hilton Head,1994:111-115.

[5] PADMANABHAN A,GOLDBERG H D,SCHMIDT M A,et al.A wafer-bonded floating-element shear-stress microsensor with optical position sensing by photodiodes[J].J MEMS,1996,5(44):307-315.

[6] ZHE J,FARMER K R,MODI V.A MEMS device for measurement of skin friction using capacitance sensing[C].Proc of IEEE MEMS 01,Berkeley,CA,2001:4-7.

[7] PE(N)A J.Characterization of a MEMS optical floating-element shear stress sensor[J].Journal of Undergraduate Research,2003,5(2):

刘奎, 苑伟政, 邓进军, 马炳和, 姜澄宇. 基于几何莫尔效应的剪应力传感器设计研究[J]. 光子学报, 2007, 36(4): 686. 刘奎, 苑伟政, 邓进军, 马炳和, 姜澄宇. Investigation of a Micro Shear Stress Sensor Using the Geometrical Moiré Effect[J]. ACTA PHOTONICA SINICA, 2007, 36(4): 686.

关于本站 Cookie 的使用提示

中国光学期刊网使用基于 cookie 的技术来更好地为您提供各项服务,点击此处了解我们的隐私策略。 如您需继续使用本网站,请您授权我们使用本地 cookie 来保存部分信息。
全站搜索
您最值得信赖的光电行业旗舰网络服务平台!