基于掠入射X射线反射谱的Mo/Si多层膜扩散系数测量
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喻波, 李春, 金春水. 基于掠入射X射线反射谱的Mo/Si多层膜扩散系数测量[J]. 中国激光, 2011, 38(11): 1107002. Yu Bo, Li Chun, Jin Chunshui. Diffusion Coefficient Measurement by Grazing Incidence X-ray Reflection in a Mo/Si Multilayer[J]. Chinese Journal of Lasers, 2011, 38(11): 1107002.