节距自适应三维目标光栅测量方法
An Adaptive Grating Pitch Measurement Method
补充材料
孙奎, 张胜, 陈亚群, 陈建飞. 节距自适应三维目标光栅测量方法[J]. 光通信研究, 2017, 43(3): 33. SUN Kui, ZHANG Sheng, CHEN Ya-qun, CHEN Jian-fei. An Adaptive Grating Pitch Measurement Method[J]. Study On Optical Communications, 2017, 43(3): 33.