微小型光学元件尺寸的视觉测量系统研制 
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Development of Visual Size-Measurement System for Micro-Optical Components
中国计量大学计量测试工程学院, 浙江 杭州 310018
图 & 表
图 1. 不均匀光照补偿算法流程
Fig. 1. Flowchart of uneven illumination compensation algorithm
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图 2. 光照补偿前后元件的对比。(a)光照补偿前;(b)光照补偿后
Fig. 2. Comparison of components before and after illumination compensation. (a) Before illumination compensation; (b) after illumination compensation
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图 3. 光学元件边缘提取。(a)原图;(b)Otsu阈值分割;(c)边缘膨胀;(d)边缘腐蚀;(e)区域分割
Fig. 3. Edge extraction of optical element. (a) Original image; (b) Otsu threshold segmentation; (c) edge expansion; (d) edge corrosion; (e) region segmentation
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图 4. 边缘提取结果对比
Fig. 4. Comparison of edge extraction results
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图 5. 目标检测结果
Fig. 5. Target detection results
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图 6. 标定板和标定线。(a)标定板;(b) 垂直的标定线;(c) 水平的标定线
Fig. 6. Calibration plate and calibration lines. (a) Calibration plate; (b) vertical calibration line; (c) horizontal calibration line
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图 7. 软件测量过程
Fig. 7. Software measurement process
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图 8. 光学元件尺寸测量软件界面
Fig. 8. Software interface of optical component dimension measurement
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图 9. 光学元件尺寸测量流程图
Fig. 9. Flow chart of optical element size measurement
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图 10. 光学元件尺寸测量系统
Fig. 10. Optical element size measuring system
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表 1标定线间距
Table1. Calibration line spacing
| Item | Vertical calibration line spacing/mm | Horizontal calibration line spacing/mm |
|---|
| 1 | 1.9211 | 1.7527 | | 2 | 1.9205 | 1.7494 | | 3 | 1.9232 | 1.7491 | | 4 | 1.9214 | 1.7551 | | 5 | 1.9233 | 1.7531 | | Mean value | 1.9219 | 1.7519 |
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表 2光学元件尺寸测量结果
Table2. Measurement results of optical components for size
| Item | Otsu method | Canny operator edge detection algorithm | Otsu algorithm based on region segmentation |
|---|
| Length/mm | Width/mm | Length/mm | Width/mm | Length/mm | Width/mm |
|---|
| 1 | 1.4599 | 1.4559 | 1.4891 | 1.4782 | 1.4638 | 1.4550 | | 2 | 1.4872 | 1.4603 | 1.6697 | 1.4977 | 1.4639 | 1.4516 | | 3 | 1.4601 | 1.4578 | 1.4868 | 1.4855 | 1.4656 | 1.4617 | | 4 | 1.4597 | 1.1703 | 1.4868 | 1.4778 | 1.4611 | 1.4575 | | 5 | 1.4601 | 1.4562 | 1.4860 | 1.4783 | 1.4618 | 1.4516 | | 6 | 1.4567 | 1.4526 | 1.4821 | 1.4750 | 1.4628 | 1.4595 | | 7 | 1.4582 | 1.4445 | 1.6530 | 1.4783 | 1.4648 | 1.4546 | | 8 | 1.4571 | 1.0586 | 1.4818 | 1.4567 | 1.4642 | 1.4585 | | 9 | 1.4573 | 1.4540 | 1.4827 | 1.4673 | 1.4616 | 1.4590 | | 10 | 1.4572 | 1.4544 | 1.4915 | 1.4815 | 1.4633 | 1.4581 |
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表 3数显测长仪测量光学元件尺寸的结果
Table3. Results of measuring size for optical components obtained by digital length gauge
| Item | Length/mm | Width/mm |
|---|
| 1 | 1.4635 | 1.4606 | | 2 | 1.4630 | 1.4608 | | 3 | 1.4633 | 1.4586 | | 4 | 1.4614 | 1.4599 | | 5 | 1.4605 | 1.4606 | | Mean value | 1.4623 | 1.4601 |
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表 4机器视觉测量尺寸的误差分析
Table4. Error analysis for measuring size of machine vision
| Item | Otsu method | Canny operator edge detection algorithm | Otsu algorithm based on region segmentation |
|---|
| Length | Width | Length | Width | Length | Width |
|---|
| Absolute error/μm | Relative error/% | Absolute error/μm | Relative error/% | Absolute error/μm | Relative error/% | Absolute error/μm | Relative error/% | Absolute error/μm | Relative error/% | Absolute error/μm | Relative error/% | | 1 | -2.4 | -0.16 | -4.2 | -0.29 | 26.8 | 1.83 | 18.1 | 1.24 | 1.5 | 0.10 | -5.1 | -0.35 | | 2 | 24.9 | 1.70 | 0.2 | 0.01 | 207.4 | 14.18 | 19.8 | 1.36 | 1.6 | 0.11 | -8.5 | -0.58 | | 3 | -2.2 | -0.15 | -2.3 | -0.16 | 24.5 | 1.68 | 25.4 | 1.74 | 3.3 | 0.23 | 1.6 | 0.11 | | 4 | -2.6 | -0.18 | -289.8 | -19.85 | 24.5 | 1.68 | 17.7 | 1.21 | -1.2 | -0.08 | -2.6 | -0.18 | | 5 | -2.2 | -0.15 | -3.9 | -0.27 | 23.7 | 1.62 | 18.2 | 1.25 | -0.5 | -0.03 | -8.5 | -0.58 | | 6 | -5.6 | -0.38 | -7.5 | -0.51 | 19.8 | 1.35 | 14.9 | 1.02 | 0.5 | 0.03 | -0.6 | -0.04 | | 7 | -4.1 | -0.28 | -15.6 | -1.07 | 190.7 | 13.04 | 18.2 | 1.25 | 2.5 | 0.17 | -5.5 | -0.38 | | 8 | -5.2 | -0.36 | -401.5 | -27.50 | 19.5 | 1.33 | -3.4 | -0.23 | 1.9 | 0.13 | -1.6 | -0.11 | | 9 | -5.0 | -0.34 | -6.1 | -0.42 | 20.4 | 1.40 | 7.2 | 0.49 | -0.7 | -0.05 | -1.1 | -0.08 | | 10 | -5.1 | -0.35 | -5.7 | -0.39 | 29.2 | 2.00 | 24.1 | 1.47 | 1.0 | 0.07 | -2.0 | -0.14 |
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表 5数显测长仪测量两种不同规格光学元件尺寸的结果
Table5. Results for measuring the size of two kinds of optical elements using digital length gauge
| Item | Filter 1 | Filter 2 |
|---|
| Length/mm | Width/mm | Length/mm | Width/mm |
|---|
| 1 | 1.3974 | 1.0005 | 1.4003 | 0.7491 | | 2 | 1.3964 | 0.9992 | 1.3996 | 0.7475 | | 3 | 1.3969 | 1.0008 | 1.3944 | 0.7488 | | 4 | 1.3992 | 1.0017 | 1.3986 | 0.7486 | | 5 | 1.4069 | 1.0009 | 1.4001 | 0.7505 | | Mean value | 1.3994 | 1.0006 | 1.3986 | 0.7489 |
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表 6元件尺寸测量结果及误差分析
Table6. Measurement results and error analysis of component size
| Item | Filter 1 | Filter 2 |
|---|
| Length | Width | Length | Width |
|---|
| Measured size/mm | Absolute error /μm | Relative error/% | Measured size /mm | Absolute error /μm | Relative error/% | Measuredsize /mm | Absolute error /μm | Relative error/% | Measured size /mm | Absolute error /μm | Relative error/% | | 1 | 1.3906 | -8.8 | -0.63 | 1.0032 | 2.8 | 0.28 | 1.3908 | -7.8 | -0.56 | 0.7452 | -3.7 | -0.49 | | 2 | 1.3941 | -5.3 | -0.38 | 1.0027 | 2.3 | 0.23 | 1.3902 | -8.4 | -0.60 | 0.7445 | -4.4 | -0.59 | | 3 | 1.3940 | -5.4 | -0.39 | 1.0054 | 5.0 | 0.50 | 1.4018 | 3.2 | 0.23 | 0.7432 | -5.7 | -0.76 | | 4 | 1.3929 | -6.5 | -0.46 | 1.0031 | 2.7 | 0.27 | 1.4072 | 8.6 | 0.61 | 0.7500 | 1.1 | 0.15 | | 5 | 1.4025 | 3.1 | 0.22 | 1.0065 | 6.1 | 0.61 | 1.4079 | 9.3 | 0.66 | 0.7487 | -0.2 | -0.03 |
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赵美丹, 余桂英, 瞿永顺, 林瑞杰, 林敏. 微小型光学元件尺寸的视觉测量系统研制[J]. 激光与光电子学进展, 2021, 58(8): 0815006. Meidan Zhao, Guiying Yu, Yongshun Qu, Ruijie Lin, Min Lin. Development of Visual Size-Measurement System for Micro-Optical Components[J]. Laser & Optoelectronics Progress, 2021, 58(8): 0815006.
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