光学学报, 1990, 10 (4): 374, 网络出版: 2007-11-12
组合递向反射镜系统中测量镜的晃动引起的附加光程
Additional optical path caused by yaw of moving roof mirror in composite retro-refletor system
摘要
组合逆向反射镜系统在二维精密工作台激光定干涉仪中起着立方角棱镜的作用.但它在晃动中易于引起附加光程.本文导出了附加光程的计算公式,提出了减小误差的措施.
Abstract
The composite retro-reflector system plays the role of the cubic corner retro-reflector on 2-D interferometric controlled precioion workstage. But it is liable to cause considerable additional optical path when it is yawing. The formulan for calculating the additional optical path are derived and the measures to reduce the error are discussed in this paper.
参考文献
蒋式弘, 陈明仪. 组合递向反射镜系统中测量镜的晃动引起的附加光程[J]. 光学学报, 1990, 10(4): 374. 蒋式弘, 陈明仪. Additional optical path caused by yaw of moving roof mirror in composite retro-refletor system[J]. Acta Optica Sinica, 1990, 10(4): 374.
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