典型工艺缺陷对光波导特性的影响研究
范哲珲, 王健. 典型工艺缺陷对光波导特性的影响研究[J]. 光电技术应用, 2015, 30(6): 26.
FAN Zhe-hui, WANG Jian. Research on Effect of Typical Process Defect on Optical Waveguide Characteristic[J]. Electro-Optic Technology Application, 2015, 30(6): 26.
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范哲珲, 王健. 典型工艺缺陷对光波导特性的影响研究[J]. 光电技术应用, 2015, 30(6): 26. FAN Zhe-hui, WANG Jian. Research on Effect of Typical Process Defect on Optical Waveguide Characteristic[J]. Electro-Optic Technology Application, 2015, 30(6): 26.
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