激光与光电子学进展, 2005, 42 (7): 22, 网络出版: 2006-06-01
超快脉冲激光沉积类金刚石膜的研究进展
The development of Ultra-Fast Pulse laser Deposition of Diamond-Like Carbon Films
超快脉冲激光(ultra-fast) 脉冲激光沉积(PLD) 类金刚石膜(DLC) ultra-fast pulse laser pulse laser deposition(PLD) diamond-like carbon films(DLC)
摘要
综述了脉冲沉积(PLD)类金刚石膜(DLC)的优势和局限,对其局限的补偿和突破,以及脉冲沉积法的重要发展方向——超快脉冲激光沉积(Ultra-fast PLD)类金刚石膜(DLC)的研究进展。
Abstract
The advantage and limit of pulse laser deposition(PLD) of diamond-like carbon films(DLC), the remedy of PLD DLC limit, and the research on the next development of PLD DLC, ultra-fast pulse laser deposition of diamond-like films are summarized.
郭延龙, 王小兵, 万强, 卢常勇. 超快脉冲激光沉积类金刚石膜的研究进展[J]. 激光与光电子学进展, 2005, 42(7): 22. 郭延龙, 王小兵, 万强, 卢常勇. The development of Ultra-Fast Pulse laser Deposition of Diamond-Like Carbon Films[J]. Laser & Optoelectronics Progress, 2005, 42(7): 22.