激光与光电子学进展, 2005, 42 (7): 22, 网络出版: 2006-06-01   

超快脉冲激光沉积类金刚石膜的研究进展

The development of Ultra-Fast Pulse laser Deposition of Diamond-Like Carbon Films
作者单位
武汉军械士官学校光电技术研究所,武汉 430075
摘要
综述了脉冲沉积(PLD)类金刚石膜(DLC)的优势和局限,对其局限的补偿和突破,以及脉冲沉积法的重要发展方向——超快脉冲激光沉积(Ultra-fast PLD)类金刚石膜(DLC)的研究进展。
Abstract
The advantage and limit of pulse laser deposition(PLD) of diamond-like carbon films(DLC), the remedy of PLD DLC limit, and the research on the next development of PLD DLC, ultra-fast pulse laser deposition of diamond-like films are summarized.
参考文献

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郭延龙, 王小兵, 万强, 卢常勇. 超快脉冲激光沉积类金刚石膜的研究进展[J]. 激光与光电子学进展, 2005, 42(7): 22. 郭延龙, 王小兵, 万强, 卢常勇. The development of Ultra-Fast Pulse laser Deposition of Diamond-Like Carbon Films[J]. Laser & Optoelectronics Progress, 2005, 42(7): 22.

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