红外与激光工程, 2005, 34 (1): 54, 网络出版: 2006-05-25
近柱面干涉检测研究
Interferometric measurement of near-cylindrical surfaces
摘要
采用计算机仿真技术模拟了近柱非球面的正入射式检测装置.获取并分析了理想近柱面和理想柱透镜下的干涉图.讨论了降低干涉图P-V值的方法以及不同面形的近柱面在该装置下的可检性.
Abstract
In this paper,the testing set for near-cylindrical surfaces is simulated by computer.The interferograms under ideal near-cylindrical surfaces and ideal cylindrical lens are got and analyzed. The method to reduce P-V value of the interferograms and the testability of all kinds of near-cylindrical surfaces under the testing set are discussed.
谢本超, 卢振武, 李凤有, 孙强. 近柱面干涉检测研究[J]. 红外与激光工程, 2005, 34(1): 54. 谢本超, 卢振武, 李凤有, 孙强. Interferometric measurement of near-cylindrical surfaces[J]. Infrared and Laser Engineering, 2005, 34(1): 54.
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