应用光学, 2019, 40 (3): 473, 网络出版: 2019-06-10
基于激光外差干涉术的薄膜厚度测量方法
Method of thin film thickness measurement based on laser heterodyne interferometry
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时凯, 苏俊宏, 齐媛. 基于激光外差干涉术的薄膜厚度测量方法[J]. 应用光学, 2019, 40(3): 473. SHI Kai, SU Junhong, QI Yuan. Method of thin film thickness measurement based on laser heterodyne interferometry[J]. Journal of Applied Optics, 2019, 40(3): 473.
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