Chinese Optics Letters, 2015, 13 (4): 041402, Published Online: Sep. 21, 2018  

Ethanol-assisted ablation of silicon and germanium by temporally shaped femtosecond pulses Download: 976次

Author Affiliations
1 Laser Micro/Nano Fabrication Laboratory, School of Mechanical Engineering, Beijing Institute of Technology, Beijing 100081, China
2 Department of Electrical Engineering, University of Nebraska-Lincoln, Lincoln, Nebraska 68588-0511, USA
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Guangming Zhang, Xin Li, Lan Jiang, Xuesong Shi, Kaihu Zhang, Qiang Cao, Yongfeng Lu. Ethanol-assisted ablation of silicon and germanium by temporally shaped femtosecond pulses[J]. Chinese Optics Letters, 2015, 13(4): 041402.

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Guangming Zhang, Xin Li, Lan Jiang, Xuesong Shi, Kaihu Zhang, Qiang Cao, Yongfeng Lu. Ethanol-assisted ablation of silicon and germanium by temporally shaped femtosecond pulses[J]. Chinese Optics Letters, 2015, 13(4): 041402.

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