Ethanol-assisted ablation of silicon and germanium by temporally shaped femtosecond pulses

Guangming Zhang; Xin Li; Lan Jiang; Xuesong Shi; Kaihu Zhang; Qiang Cao; Yongfeng Lu

doi:doi:10.3788/COL201513.041402

Chinese Optics Letters, 2015, 13 (4): 041402, Published Online: Sep. 21, 2018

Ethanol-assisted ablation of silicon and germanium by temporally shaped femtosecond pulses Download： 975次

Guangming Zhang ¹Xin Li ^1,*Lan Jiang ¹Xuesong Shi ¹Kaihu Zhang ¹Qiang Cao ¹Yongfeng Lu ²

Author Affiliations

¹ Laser Micro/Nano Fabrication Laboratory, School of Mechanical Engineering, Beijing Institute of Technology, Beijing 100081, China

² Department of Electrical Engineering, University of Nebraska-Lincoln, Lincoln, Nebraska 68588-0511, USA

Figures & Tables

Fig. 1. SEM images of craters produced by 20 double pulses at a repetition rate of 20 Hz in different mediums: (a) in air, F=0.6 J/cm2; (b) in ethanol, F=0.4 J/cm2; (c) in ethanol, F=0.6 J/cm2.

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Fig. 2. Ablation area as a function of the pulse delays at different laser fluences: (a) air, (b) ethanol.

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Fig. 3. SEM images of crater morphologies obtained at Δt=500 fs in (a) air and (b) ethanol. Two-dimensional profiles of the craters produced in (c) air and (d) ethanol.

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Fig. 4. Ablation area as a function of pulse delays in Ge in the ethanol solution.

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Guangming Zhang, Xin Li, Lan Jiang, Xuesong Shi, Kaihu Zhang, Qiang Cao, Yongfeng Lu. Ethanol-assisted ablation of silicon and germanium by temporally shaped femtosecond pulses[J]. Chinese Optics Letters, 2015, 13(4): 041402.

Ethanol-assisted ablation of silicon and germanium by temporally shaped femtosecond pulses Download： 975次

Fig. 1. SEM images of craters produced by 20 double pulses at a repetition rate of 20 Hz in different mediums: (a) in air, F=0.6 J/cm2; (b) in ethanol, F=0.4 J/cm2; (c) in ethanol, F=0.6 J/cm2.

Fig. 2. Ablation area as a function of the pulse delays at different laser fluences: (a) air, (b) ethanol.

Fig. 3. SEM images of crater morphologies obtained at Δt=500 fs in (a) air and (b) ethanol. Two-dimensional profiles of the craters produced in (c) air and (d) ethanol.

Fig. 4. Ablation area as a function of pulse delays in Ge in the ethanol solution.

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Ethanol-assisted ablation of silicon and germanium by temporally shaped femtosecond pulses Download： 975次

Fig. 1. SEM images of craters produced by 20 double pulses at a repetition rate of 20 Hz in different mediums: (a) in air, F=0.6 J/cm2; (b) in ethanol, F=0.4 J/cm2; (c) in ethanol, F=0.6 J/cm2.

Fig. 2. Ablation area as a function of the pulse delays at different laser fluences: (a) air, (b) ethanol.

Fig. 3. SEM images of crater morphologies obtained at Δt=500 fs in (a) air and (b) ethanol. Two-dimensional profiles of the craters produced in (c) air and (d) ethanol.

Fig. 4. Ablation area as a function of pulse delays in Ge in the ethanol solution.

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