中国激光, 1996, 23 (2): 135, 网络出版: 2006-12-04
氢化非晶硅pin二极管型光寻址空间光调制器的研制
Optically Addressed Spatial Light Modulator Using an α-Si: H pin photodiode
氢化非晶硅 pin二极管 扭曲向列型液晶 光寻址空间光调制器 hydrogenated amorphous silicon pin diode twist nematic liquid crystal optically addressed spatial light modulator
摘要
报道了用氢化非晶硅(α-Si:H)pin二极管作光敏层,扭曲向列型液晶(TnLC)作电光调制层的光寻址空间光调制器(OASLM)的设计、制作与性能测试.结果表明制得的(OASLM)分辨率大于20Lp/MM;在300Lux白光写入时对比度高于25:1;白光写入灵敏度约3Lux。
Abstract
We report the fabrication and operation of an optically addressed spatial light modulator(OASLM), consisting of a hydrogenated amorphous silicon (α-Si: H) pin photodiode as a photosensor and a twist nematic liquid crystal(TNLC) as the modulating material. The intrinsic and doped α-Si: H films are deposited continuously by pECVD method in a reaction chamber with a shutter. The optical measurement indicates that the OASLM has a resolution of at least 20 lp/mm. The contrast ratio under the 300 lux illumination of white light is higher than 25:1. The white light writing sensitivity is about 3 lux.
顾晓峰, 黄信凡, 杜家方, 周进, 李伟, 陈坤基. 氢化非晶硅pin二极管型光寻址空间光调制器的研制[J]. 中国激光, 1996, 23(2): 135. 顾晓峰, 黄信凡, 杜家方, 周进, 李伟, 陈坤基. Optically Addressed Spatial Light Modulator Using an α-Si: H pin photodiode[J]. Chinese Journal of Lasers, 1996, 23(2): 135.