355 nm紫外激光抛光Al2O3陶瓷作用机理的实验研究
华显刚, 魏昕, 周敏, 谢小柱. 355 nm紫外激光抛光Al2O3陶瓷作用机理的实验研究[J]. 中国激光, 2014, 41(12): 1203002.
Hua Xiangang, Wei Xin, Zhou Min, Xie Xiaozhu. Experimental Study on Mechanism of 355 nm Ultraviolet Laser Polishing of Al2O3 Ceramics[J]. Chinese Journal of Lasers, 2014, 41(12): 1203002.
[1] 崔园园. 激光加工陶瓷胚体的工艺研究[D]. 北京: 清华大学, 2010.
Cui Yuanyuan. Study of Laser Machining Ceramic Green Bodies[D]. Beijing: TsinghuaUniversity, 2010.
[2] A Braun, K Zimmer, B, Hosselbrath, et al.. Excimer laser micromachining and replication of 3D optical surfaces[J]. Apply Surface Science, 1998, 127: 911-914.
[3] T M Shaoa, M Hua, H Y Tam, et al.. An approach to modeling of laser polishing of metals[J]. Surface & Coatings Technology, 2005, 197(1): 77-84.
[4] J Hildebranda, K Hecht, J Bliedtner, et al.. Laser beam polishing of quartz glass surfaces[J]. Physics Procedia, 2011, 12: 452-461.
[5] R M Brusasco, B M Penetrante, J A Butler, et al.. CO2 Laser polishing for reduction of 351 nm surface damage initiation in fused silica[C]. International Society for Optics and Photonics, 2002. 34-39.
[6] 杨焕, 黄珊, 段军, 等. 飞秒与纳秒激光刻蚀单晶硅对比研究[J]. 中国激光, 2013, 40(1): 0103003.
[7] C H Tsai. H W Chen. Laser milling of cavity in ceramic substrate by fracture machining element technique[J]. Journal of materials Processing Technology, 2003, 136(1): 158-165.
[8] 谢小柱, 黄显东, 陈蔚芳, 等. 脉冲绿激光划切蓝宝石基片过程研究[J]. 中国激光, 2013, 40(12): 1203010.
[9] 刘莹, 温诗铸. 不同材料的准分子微细加工机制[J]. 机械科学与技术, 2005, 24(1): 62-65.
Liu Ying, Wen Shizhu. Excimer micromachining mechanism of different materials[J]. Mechanical Science and Technology, 2005, 24(1): 62-65.
[10] H Horisawa, E Hajime. Surface machining characteristics of sapphire with fifth harmonic YAG laser pulses[J]. Vacuum, 2004, 73(3-4): 661-666.
[11] X X Li, T Q Jia, D H Feng, et al.. Ablation induced by femtosecond laser in sapphire[J]. Applied Surface Science, 2004, 225(1-4): 339-346.
[12] 徐刚, 戴玉堂, 肖翔. 超短激光抛光微加工的数学建模与实验研究[J]. 中国激光, 2013, 40(6): 0603003.
[13] E N Solodkii, N F Solodkii. Reasons for tinting of corundum ceramics (A Review)[J]. Glass and Ceramics, 2001, 58(11): 391-393.
[14] E Kacara, M Mutlua, E Akman, et al.. Characterization of the drilling alumina ceramic using NdYAG pulsed laser[J]. Journal of Materials Processing Technology, 2009, 209(4): 2008-2014.
[15] M M Hanon, E Akman, O B Genc, et al.. Experimental and theoretical investigation of the drilling of alumina ceramicusing NdYAG pulsed laser[J]. Optics & Laser Technology, 2012, 44(4): 913-922.
华显刚, 魏昕, 周敏, 谢小柱. 355 nm紫外激光抛光Al2O3陶瓷作用机理的实验研究[J]. 中国激光, 2014, 41(12): 1203002. Hua Xiangang, Wei Xin, Zhou Min, Xie Xiaozhu. Experimental Study on Mechanism of 355 nm Ultraviolet Laser Polishing of Al2O3 Ceramics[J]. Chinese Journal of Lasers, 2014, 41(12): 1203002.