红外焦平面列成像技术已经进入了成熟期.本文对几种红外焦平面列阵器伯如MCT、InSb和QWIP的最新进展作一评述,简要介绍其器件发展水平、技术路线和关键工艺.简要提及一种新颖的非制冷焦平面成像技术:光学读出微光机红外接收器.

Infrared focal plane array (IRFPA) imaging technology has been matured during the passed decade. In this paper an overview of recent progress to several kind of IRFPA such as MCT, InSb and QWIP is provided , focusing on new device development, technical lines and key technologies. Also, a new type of uncooled FPA imaging technique--micro-optomechanical infrared receiver with optical readout is briefly introduced.