中国激光, 1997, 24 (4): 302, 网络出版: 2006-10-31
明胶用于制作保真沟形微光学元件的酶蚀显形技术
Enzyme etching developing Technique for Fabricating Continuous Relief Microoptics Elements
摘要
在分析未硬化重铬酸盐明胶水洗显影工艺沟形保真能力差的原因的基础上,提出了用预硬化明胶来制作高保真沟形微光学元件的酶蚀显影技术。并实验验证了这种技术的可行性。初步结果令人满意。
Abstract
A new technique for fabricating continuous relief microoptics elements is presented, in which the prehardened dichromate gelatin (DCG) is used as the recording medium and the protein digesting enzyme as developer. The experimental demonstration for this method is given as well in this paper.
唐继跃, 徐平, 郭履容, 陈波, 蔡铁权. 明胶用于制作保真沟形微光学元件的酶蚀显形技术[J]. 中国激光, 1997, 24(4): 302. 唐继跃, 徐平, 郭履容, 陈波, 蔡铁权. Enzyme etching developing Technique for Fabricating Continuous Relief Microoptics Elements[J]. Chinese Journal of Lasers, 1997, 24(4): 302.