光学学报, 1987, 7 (10): 957, 网络出版: 2011-09-20
高重复频率XeCl准分子激光器
A high repetition rate XeCl excimer laser
摘要
本文报道一台高重复频率XeC准分子激光器的结构及其特性。采用接地栅金属陶瓷闸流管开关和气体横向流动系统及自动紫外火花预电离的放电结构。该激光器最高单脉冲能量为200mJ,最高重复脉冲频率为107Hz,最大平均功率18W。
Abstract
Configuration and performances of a high repetition rate XeCl exoimer laser are reported. A ceramio-metal grounded grid thyratron used as pulse switch, a transverse flow system, and a structure of fast transverse discharge of UV preionization are adopted in the laser system. The maximun output pulse energy is 200 mJ, maximum average power is 18 W at a repetition rate of 107 Hz.
参考文献
南英子, 吴海林, 王长山, 耿秀兰, 步云凯. 高重复频率XeCl准分子激光器[J]. 光学学报, 1987, 7(10): 957. NAN YINGZI, WU HAIliN, WANG CHANSHAN, GENG XIULAN, Li YINKAI. A high repetition rate XeCl excimer laser[J]. Acta Optica Sinica, 1987, 7(10): 957.
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