[1] M. Vannoni, G. Molesini. Liquid mirror as planarity standard: a simplified experimental approach［C］. SPIE, 2005, 5856: 536-543

[2] L. Rayleigh. Interference bands and their applications[J]. Nature, 1893, 48(1235): 212-214

[3] G. Schulz, J. Schwider. Precise measurement of plainness[J]. Appl. Opt., 1967, 6(6): 1077-1084

[4] G. Schulz, J. Schwider, C. Hiller et al.. Establishing an optical flatness standard[J]. Appl. Opt., 1971, 10(4): 929-934

[5] P. B. Keenan. Pseudo-shear interferometry[C]. SPIE, 1984, 123: 2-9

[6] B. S. Fritz. Absolute calibration of an optical flat[J]. Opt. Eng., 1984, 23(4): 379-383

[7] C. Ai, J. C. Wyant. Absolute testing of flats decomposed to even and odd function[C]. SPIE, 1992, 1776: 73-83

[8] C. Ai, J. C. Wyant. Absolute testing of flats by using even and odd function[J]. Appl. Opt., 1993, 32(25): 4698-4705

[9] Chris J. Evans, Robert N. Kestner. Test optics error removal[J]. Appl. Opt., 1996, 35(7): 1015-1021

[10] Klaus R. Freischlad. Absolute interferometric testing based on reconstruction of rotational shear[J]. Appl. Opt., 2001, 40(10): 1637-1648

[11] Michael F. Küchel. A new approach to solve the three flat problem[J]. Optik, 2001, 112(9): 381-391

[12] Ulf Griesmann. Three-flat test solutions based on simple mirror symmetry[J]. Appl. Opt., 2006, 45(23): 5856-5865

[13] Ulf Griesmann, Quandou Wang, Johannes Soons. Three-flat tests including mounting-induced deformations[J]. Opt. Eng., 2007, 46(9): 093601

[14] Michael Schulz, Clemens Elster. Traceable multiple sensor system for measuring curved surface profiles with high accuracy and high lateral resolution[J]. Opt. Eng., 2006, 45(6): 060503

[15] Chen Lingfeng, Sha Dingguo. Evaluation of the sphericity measurement uncertainty for the fiber point diffraction interferometer[C]. SPIE, 2007, 6834: 68342N

[16] Chen Xu, Lei Chen, Jiayi Yin. Method for absolute flatness measurement of optical surfaces[J]. Appl. Opt., 2009, 48(13): 2536-2541

[17] 刘晓梅. 光学平面的绝对检测[D]. 南京: 南京理工大学, 2004

    Liu Xiaomei. Absolute Measurement of Optical Flat[D]. Nanjing: Nanjing University of Science & Technology, 2004

[18] 苗二龙, 张健, 谷勇强 等. 用于光刻投影物镜检测的高精度菲佐干涉仪误差分析[J]. 中国激光, 2010, 37(8): 2029-2034

    Miao Erlong, Zhang Jian, Gu Yongqiang et al.. Measurement error analysis of high precision Fizeau interferometer for lithography projection objective[J]. Chinese J. Lasers, 2010, 37(8): 2029-2034

[19] 陈旭, 袁文全, 冯玉涛 等. 绝对检验参考镜误差分析与热变形模型建立[J]. 光学学报, 2011, 31(2): 0212002

    Chen Xu, Yuan Wenquan, Feng Yutao et al.. Study of the error of the reference lens in absolute spherical testing and the thermal deformation model establishment[J]. Acta Optica Sinica, 2011, 31(2): 0212002

[20] 刘东, 杨甬英, 田超 等. 非球面非零位检测中的回程误差分析与校正[J]. 光学学报, 2009, 29(3): 688-696

    Liu Dong, Yang Yongying, Tian Chao et al.. Analysis and correction of retrace error for nonnull aspheric testing[J]. Acta Optica Sinica, 2009, 29(3): 688-696