Chinese Optics Letters, 2019, 17 (11): 113101, Published Online: Sep. 12, 2019   

Effect of annealing on the damage threshold and optical properties of HfO2/Ta2O5/SiO2 high-reflection film Download: 959次

Author Affiliations
State Key Laboratory of High-Power Semiconductor Laser, Changchun University of Science and Technology, Changchun 130022, China
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Jianing Dong, Jie Fan, Sida Mao, Yunping Lan, Yonggang Zou, Haizhu Wang, Jiabin Zhang, Xiaohui Ma. Effect of annealing on the damage threshold and optical properties of HfO2/Ta2O5/SiO2 high-reflection film[J]. Chinese Optics Letters, 2019, 17(11): 113101.

References

[1] YoonS. G.KimY. T.KimH. K.KimM. J.LeeH. M.YoonD. H., Mater. Sci. Eng. B118, 234 (2005).MSBTEK0921-5107

[2] KulischW.GillilandD.CecconeG.RauscherH.SirghiL.ColpoP.RossiF., J. Vac. Sci. Technol. A26, 991 (2008).JVTAD60734-2101

[3] PatelD.SchiltzD.LangtonP. F.EmmertL.AcquaroliL. N.BaumgartenC.ReaganB.RoccaJ. J.RudolphW.MarkosyanA.RouteR. R.FejerM.MenoniC. S., Proc. SPIE8885, 888522 (2013).PSISDG0277-786X

[4] SchiltzD.PatelD.EmmertL.BaumgartenC.ReaganB.RudolphW.RoccaJ. J.MenoniC. S., in Advanced Photonics (2015), paper NS4B.3.

[5] XuC.DongH. C.MaJ. Y.JinY. X.ShaoJ. D.FanZ. X., Chin. Opt. Lett.6, 228 (2008).CJOEE31671-7694

[6] WangC.JinY.ZhangD.ShaoJ.FanZ., Opt. Laser Technol. 41, 570 (2009)

[7] ZhaoY.WangY.GongH.ShaoJ.FanZ., Appl. Surf. Sci. 210, 353 (2003).

[8] XuC.XiaoQ.MaJ.JinY.ShaoJ.FanZ., Appl. Surf. Sci.254, 6554 (2008).

[9] BananejA.HassanpourA., Appl. Surf. Sci.258, 2397 (2012).ASUSEE0169-4332

[10] HassanpourA.BananejA., Optik124, 35 (2013).OTIKAJ0030-4026

[11] ShenY.HanZ.ShaoJ. D.ShaoS. Y.HeH. B., Chin. Opt. Lett.6, 225 (2008).CJOEE31671-7694

[12] JeanS.TokasR. B.RaoK. D.ThakurS.SahooN. K., Appl. Opt.55, 1 (2016).

[13] JenaS.TokasR. B.ThakurS.SahooN. K., AIP Conf. Proc.1832, 060005 (2017).APCPCS0094-243X

[14] NiJ.ZhouQ.LiZ.ZhangZ., Appl. Phys. Lett.93, 011905 (2008).APPLAB0003-6951

[15] XuC.YiP.FanH.QiJ.QiangY.LiuJ.TaoC.LiD., Appl. Surf. Sci.289, 141 (2014).ASUSEE0169-4332

[16] SwanepoelR., J. Phys. E: Sci. Instrum.16, 1214 (1983).JPSIAE0022-3735

[17] YaoJ.ShaoJ.HeH.FanZ., Appl. Surf. Sci.253, 8911 (2007).ASUSEE0169-4332

[18] ZhangD.ShaoJ.ZhangD.FanS.TanT.FanZ., Opt. Lett.29, 2870 (2004).OPLEDP0146-9592

[19] JenaS.TokasR. B.TripathiS.RaoK. D.UdupaD. V.ThakurS.SahooN. K., J. Alloy Compd.771, 373 (2019).

[20] PattersonA. L., Phys. Rev.56, 978 (1939).PHRVAO0031-899X

[21] WangZ.AlanizJ. E.JangW.GarayJ. E.DamesC., Nano Lett. 11, 2206 (2011).NALEFD1530-6984

[22] ShawkleinL. J.BurnsS. J.JacobsS. D., Appl. Opt.32, 3925 (1993).APOPAI0003-6935

[23] ISO, “Lasers and laser-related equipment-determination of laser-induced damage threshold of optical surfaces-part 1:1-on-1 test,” ISO 11254-1 (2000).

[24] YoshidaK.YabeT.YoshidaH.YamanakaC., J. Appl. Phys, 60, 1545 (1986).

[25] TanT.-T.LiuB.-J.WuZ.-H.LiuZ.-T., Acta. Metall. Sin.30, 75 (2017).

Jianing Dong, Jie Fan, Sida Mao, Yunping Lan, Yonggang Zou, Haizhu Wang, Jiabin Zhang, Xiaohui Ma. Effect of annealing on the damage threshold and optical properties of HfO2/Ta2O5/SiO2 high-reflection film[J]. Chinese Optics Letters, 2019, 17(11): 113101.

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