反应磁控溅射制备SiOx渐变折射率红外梳状滤光片
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宋秋明, 黄烽, 李明, 谢斌, 王海千, 姜友松, 宋亦周. 反应磁控溅射制备SiOx渐变折射率红外梳状滤光片[J]. 中国激光, 2009, 36(8): 2144. Song Qiuming, Huang Feng, Li Ming, Xie Bin, Wang Haiqian, Jiang Yousong, Song Yizhou. Graded Refractive-Index SiOx Infrared Rugate Filter Prepared by Reactive Magnetron Sputtring[J]. Chinese Journal of Lasers, 2009, 36(8): 2144.