光学学报, 1983, 3 (5): 466, 网络出版: 2011-09-15
获得特殊圆分度光栅的一种途径
An approach to the ruling of special circle-dividing gratings
摘要
本文叙述了在光栅光刻工艺的基础上,采用一些特殊的措施,刻制了任意条纹的圆分度光栅,带四倍频的圆分度光栅及带绝对零位的圆分度光栅.
Abstract
In this paper, some special measures based on the grating photoetehing technique are presented. The ruling of circle-dividing gratings with optional fringes, quadruple frequency and absolute zero has been carried out in this manner.
祝继彬. 获得特殊圆分度光栅的一种途径[J]. 光学学报, 1983, 3(5): 466. ZHU JIBIN. An approach to the ruling of special circle-dividing gratings[J]. Acta Optica Sinica, 1983, 3(5): 466.
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