[1] 黄坤涛, 房丰洲, 宫虎. 超精密车削表面微观形貌对光学特性的影响［J］. 光学精密工程, 2013, 21(1): 102-106.

    HUANG K R, FANG F ZH, GONG H. Effect of sursafe microscopic topology generated by ultra-precision turning on optical characteristics ［J］. Opt. Precision Eng., 2013, 21(1): 102-106. (in Chinese)

[2] 袁哲俊, 王先逵.精密和超精密加工技术［M］.北京: 机械工业出版社, 2010.

    YUAN ZH J, WANG X K. Precision and Ultra Precision Machining ［M］. Beijing: China Machine Press, 2010. ( in Chinese)

[3] 黑沫, 鲁亚飞, 张智永, 等. 基于动力学模型的快速反射镜设计［J］. 光学精密工程, 2013, 21(1): 54-60.

    HEI M, LU Y F, ZHANG ZH Y, et al.. Design of fast steering mirror based on dynamics model ［J］. Opt. Precision Eng., 2013, 21(1): 54-60. (in Chinese)

[4] C.基泰尔. 固体物理导论［M］. 北京: 化学工业出版社, 2011.

    KITTEL C. Introduction to Solid State Physics［M］. Beijing: Chemical Industry Press, 2011. (in Chinese)

[5] TANATA H, SHIMADA S, HIGUCHI M, et al.. Mechanism of cutting edge chipping and Its suppression in diamond turning of copper ［J］. Annals of the CIRP, 2005, 54(1): 51-54.

[6] TANATA H, SHIMADA S, ANTHONY L. Requirements for ductile-mold machining based on deformation analysis of mono-crystalline silicon by molecular dynamic simulation［J］. Annals of the CIRP, 2007, 56(1): 53-56.

[7] OLIVER WC, PHARR GM. An improved technique for detennining hardness and elastic modulususing load and dis-placement sensing indentation experiments［J］. J. Master Res., 1992, 7(6):1564-1583.

[8] 戴欣平, 赵萍, 文东辉. 单晶蓝宝石的延性研磨加工［J］. 光学精密工程, 2012, 20(6): 1317-1323.

    DAI X P, ZHAO P, WEN D H. Ductile lapping of single crystal sapphire［J］. Opt. Precision Eng., 2012, 20(6): 1317-1323. (in Chinese)

[9] ZHANG ZH Y, ZHANG X ZH, GUO X G, et al.. Hardening mechanism of twin boundaries during nanoindentation of soft-brittle CdTe crystals［J］. Scripta Materialia, 2013, 69:457-460.

[10] LISNYAK V V, DUB S N, STRATIICHUK D A, et al.. Nanoindentation study on viscoelasticity in cesium tungstophosphate glasses［J］. Materials Letters, 2008, 62: 1905-1908.

[11] 宋冬生, 王雷.石英玻璃紫外波段折射率测量［J］.应用光学, 2011, 32(6): 706-708.

    SONG D SH, WANG L. Refractive index measurement for quartz glass in ultraviolet band ［J］. Journal of Applied Optics, 2011, 32(6): 706-708. (in Chinese)

[12] 叶大年, 李哲, 郝伟. 变质反应中硅氧键总平均值的变化［J］.科学通报, 2001, 46(1): 61-63.

    YE D N, LI ZH, HAO W. Changes in the silicon-oxygen bond metamorphic reactions overall average［J］. Chinese Science Bulletin, 2001, 46(1):61-63. (in Chinese)

[13] TERSOFF J. Modeling solid-state chemistry: Interatomic potentionals for multicomponent systems［J］. Physical Review B, 1989, 39(8): 5566-5568.

[14] LI CH, ZHANG L CH. Mechanical behaviour characterisation of silicon and effect of loading rate on pop-in: A nanoindentation study under ultra-low loads［J］. Materials Science and Engineering A, 2009, 506:125-129.

[15] CHANG L, ZHANG L CH. Deformation mechanisms at pop-out in monocrystaline silicon under nanoindention［J］. Acta Material , 2009, 57:2148-2153.

[16] SANGWALK. On the reverse Indentation size effect and microhardness measurement of solids ［J］.Materials Chemistry and Physics, 2000, 63: 145-152.