Six-frame Algorithm Insensitive to the Linear Reference Phase and Detector Nonlinearity Errors for Phase-stepping Interferometry

WEI Chunlong; CHEN Mingyi; DING Zheng; WANG Zhijiang

Chinese Journal of Lasers B, 1997, 6 (2): 117, 网络出版: 2006-10-31

Six-frame Algorithm Insensitive to the Linear Reference Phase and Detector Nonlinearity Errors for Phase-stepping Interferometry

论文大纲

WEI Chunlong ¹CHEN Mingyi ²DING Zheng ²WANG Zhijiang ³

作者单位

¹ Department of Electronic Engineering, Shanghai University Jiading Campus, Shanghai 201800

² Department of Mechanic Engineering, Shanghai University Jiading Campus, Shanghai 201800

³ Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800

interferometry phase-stepping algorithm

摘要

Abstract

A new six-frame algorithm based on Hariharan' s five-frame algorithmis derived. Although six-frame interferograms are needed, the new algorithm is immune to the effect of reference phase error or the second order detector nonlinearity error.Furthermore, if they exist simultaneously, the new algorithm is insensitive to both of the errors. It is better than B. Zhao and Y. Surrel's six-frame algorithm to some extent.

参考文献

[1] P. Carre. Installation et utilization du comparateur photoelectrique et interferentiel du Bureau International des Poids et Mesures. Metrologia, 1966, 2(1): 13～23

[2] J. Schmit, K. Creath. Extended averaging technique for derivation of error-compensating algorithms in phase-shifting, interferometry. Appl. Opt., 1995, 34: 3610～3619

[3] C. Joenathan. Phase-measuring interferometty:new methods and error analysis. Appl. Opt., 1994, 33: 4147～4155

[4] Y. Surrel. Phase stepping:a new self-calibrating algorithm. Appl. Opt., 1993, 32: 3598～3600

[5] J. schwider, 0. Falkenstorter, H. Schrelber et al.. New compensating four-phase algorithm for phase-shift interferometry. Opt. Engng., 1993, 32: 1883～1885

[6] G. S. Han, S. W. Kim. Numerical correction of reference phases in phase-shifting interferomitry by iterative least-squares fitting. Appl. Opt., 1994, 33: 7321～7325

[7] K. Hibiho, B. F. Oreb, D. I. Farrant et al.. Phase shifting for nonsinusoidal waveforms with phase-shift errors. J. Opt. Soc. Am. A, 1995, 12: 761～768

[8] K. G. Larkin, B. F. Oreb. A New seven-sample symmetrical phase-shifting algorithm. SPIE, 1992, 1755: 2～11

[9] K. G. Larkin, B. F. Oreb. Design and assessment of symmetrical phase-shifting algorithms. J. Opt. Soc. Am. A, 1992, 9: 1740～1748

[10] B. Zhao, Y. Surrel. Phase shifting: six-sample self-calibrating algorithm insensitive to the second harmonic in the fringe signal. Opt. Engng., 1995, 34: 2821～2822

[11] P. Hariharan, B. F. Oreb, T. Eiju. Digital phase-shifting interferometry:a simple error-compensating phase calculation algorithm. Appl. Opt., 1987, 26(6): 1112～1116

[12] K. Greath. Error sources in phase-measuring interferometry. SPIE, 1992, 1720: 428～435

WEI Chunlong, CHEN Mingyi, DING Zheng, WANG Zhijiang. Six-frame Algorithm Insensitive to the Linear Reference Phase and Detector Nonlinearity Errors for Phase-stepping Interferometry[J]. Chinese Journal of Lasers B, 1997, 6(2): 117. WEI Chunlong, CHEN Mingyi, DING Zheng, WANG Zhijiang. Six-frame Algorithm Insensitive to the Linear Reference Phase and Detector Nonlinearity Errors for Phase-stepping Interferometry[J]. 中国激光(英文版), 1997, 6(2): 117.

Six-frame Algorithm Insensitive to the Linear Reference Phase and Detector Nonlinearity Errors for Phase-stepping Interferometry

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