光学学报, 1984, 4 (10): 946, 网络出版: 2011-09-15
光电自动补偿的椭偏仪
A new type of automatic ellipsometer
摘要
本文介绍一种新的电光补偿自动椭偏仪.详细讨论了它的设计原理,并给出SiO_2膜上的测量结果.这种方法可发展成为自动椭偏谱仪.
Abstract
In this paper, we describe a new electro-optical compensated automatic ellipsome-ter. The design principles are discussed in detail and the measurement results on SiO2 film are given. A new type of automatic spectrum-ellipsometer may be developed based on it.
参考文献
谢北星. 光电自动补偿的椭偏仪[J]. 光学学报, 1984, 4(10): 946. XIB BEIXING. A new type of automatic ellipsometer[J]. Acta Optica Sinica, 1984, 4(10): 946.
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