高灵敏紫外激光脉冲能量在线检测系统设计

介绍了一种基于PIN光电二极管的紫外激光脉冲能量在线检测系统。首先, 采用激光主光路外的检测光实现激光脉冲能量的无损在线响应; 其次, 采用高速高精度积分电路将响应光电流处理为电压峰值; 最后, 利用激光系统的同步触发信号进行检测时序设计从而获得精确的激光脉冲前后的检测系统输出差值, 经过计算后获得精确的激光脉冲能量。检测系统在248 nmKrF和308 nmXeCl准分子激光器上进行了测试, 实现了对0～200 Hz重复率运行的准分子激光能量在线无损检测, 测量结果与输出端外置能量计测得结果相对比, 相关性与可重复性一致, 满足应用需求。

Abstract

A kind of ultraviolet pulse laser energy detection system based on PIN photodiode was introduced. Firstly, the light outside main optical path was used to realize nondestructive and real-time pulse energy detecting. Secondly, high-speed and high-precision integral circuit was designed to process photocurrent signal for voltage peak. Finally, the synchronous trigger signal of laser system was used for timing sequence design. Thus, the accurate voltage difference was obtained and the exact laser pulse energy can be calculated. Tested on 248 nmKrF and 308 nmXeCl excimer laser, the real-time nondestructive measuring was realized while the laser ran in a pulse repetition mode up to 200 Hz. The relevance and repeatability of the measuring data were in accordance with the results of the external energy meter of output end and the system meets the application requirements.

参考文献

[1] Yu Yinshan, You Libing, Liang Xu, et al. Progress of excimer lasers technology[J]. Chinese J Lasers, 2010, 37(9): 2253-2270. (in Chinese)

[2] Liu Shiyuan, Wu Xiaojian. Real-time exposure dose control algorithm for DUV excimer lasers[J]. Acta Optica Sinica, 2006, 26(6): 878-884.

[3] Wakabayashi O, Enami T, Ishii K, et al. High-repetition-rate ArF excimer laser for microlithography[C]//SPIE, 2000, 4088: DOI10.1117/12. 405749.

[4] Inoue S, Fujisawa T, Izuha K. Effective exposure dose measurement in optical microlithography[C]//SPIE, 2000, 3998: DOI10.1117/12. 386445.

[5] Shi Haiyan, Zhao Jiangshan, Song Xingliang, et al. Analysis on factors affecting energy stability of excimer laser for lithography[J]. Infrared and Laser Engineering, 2014, 43(11): 3540-3546. (in Chinese)

[6] Xie Chengke, Chen Ming, Yang Baoxi, et al. Development and performance testing of pulsed excimer laser energy detector[J]. Chinese J Lasers, 2015, 42(1): 0102006. (in Chinese)

[7] Hu Juntao, Liu Xiang, Zhang Guoyong, et al. A real-time energy meter for medical excimer laser[J]. Chinese J Lasers, 2007, 34(12): 1732-1735. (in Chinese)

[8] Liang Xu, You Libing, Wang Tao, et al. Excimer pulse energy stabilization realized by charging voltage realtime adjusting[J]. Chinese J Lasers, 2010, 37(2): 374-378.

[9] Zhang Lei, Zhao Jun, Yang Pengling, et al. Pyroelectric detecting of high-repetition-frequency pulse laser[J]. Laser & Optoelectronics Progress, 2010, 47(7): 109-113. (in Chinese)

[10] Liang Xu, You Libing, Yu Yinshan. Excimer laser pulse energy detection under pulse repetion running mode[J]. Chinese Journal of Quantum Electronics, 2010, 27(3): 281-287. (in Chinese)

[11] Cen Zhaofeng, Li Xiaotong, Zhu Qihua. Stray light analysis for optical system[J]. Infrared and Laser Engineering, 2007, 36(3): 300-304. (in Chinese)

[12] Zhang Haibo, Lou Qihong, Zhou Jun, et al. ArF excimer laser line narrowing technique[J]. Laser & Optoelectronics Progress, 2009, 46 (12): 46-51. (in Chinese)

[13] Wang Qi, Wang Xiaoman, Zhao Haili, et al. Research on weak laser energy detection system[J]. Journal of Changchun University of Science and Technology (Natural Science Edition), 2016, 39(2): 62-66. (in Chinese)

[14] Feng Gang, Feng Guobin, Shao Bibo, et al. Energy measurement of high-repetition-rate pulsed laser[J]. Chinese Optics, 2013, 6(2): 196-200. (in Chinese)

[15] Barna A, F 觟ldes I B, Gingl Z, et al. Compact energy measuring system for short pulse lasers[J]. Metrology and Measurement Systems, 2013, 20(2): 183-190.

[16] Xiong Yan, Lu Yaodong, Zhu Min, et al. Design of peak holding circruit for narrow laser pulse[J]. Laser & Infrared, 2012, 42(12): 1377-1380. (in Chinese)

李文洁, 赵读亮, 林颖, 梁勖, 方晓东. 高灵敏紫外激光脉冲能量在线检测系统设计[J]. 红外与激光工程, 2017, 46(12): 1222002. Li Wenjie, Zhao Duliang, Lin Ying, Liang Xu, Fang Xiaodong. Design of highly sensitive on-line detecting system for ultraviolet pulse lasers energy[J]. Infrared and Laser Engineering, 2017, 46(12): 1222002.

高灵敏紫外激光脉冲能量在线检测系统设计

关于本站 Cookie 的使用提示

全站搜索

高灵敏紫外激光脉冲能量在线检测系统设计

相关论文

相关资讯

关于本站 Cookie 的使用提示

全站搜索