无限远前后零位补偿结合的非球面检验 
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Aspheric Test Combining Front and Back Null Compensation for Infinite Optical Path
中国科学院上海技术物理研究所空间主动光电技术重点实验室, 上海 200083
图 & 表
图 1. 无限远前后零位补偿结合的非球面检验的光路图
Fig. 1. Optical layout of aspheric test combining front and back null compensation for infinite optical path
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图 2. 后零位补偿透镜Q1与β2的关系
Fig. 2. Relationship between β2 and Q1 of back null compensation lens
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图 3. 前零位补偿透镜Q2与β2的关系
Fig. 3. Relationship between β2 and Q2 of front null compensation lens
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图 4. 待检非球面镜的最大口径
Fig. 4. Maximum aperture of aspheric mirror to be tested
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图 5. 待检非球面镜的最大相对孔径
Fig. 5. Maximum relative aperture of aspheric mirror to be tested
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图 6. R=9 m时采用前后零位补偿方法设计的光路图
Fig. 6. Optical layout designed by using front and back null compensation when R=9 m
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图 7. R=9 m时采用前后零位补偿方法设计的面形波前误差
Fig. 7. Surface wavefront error designed by using front and back null compensation when R=9 m
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图 8. R=9 m时采用前后零位补偿方法设计的球差曲线
Fig. 8. Spherical aberration designed by using front and back null compensation when R=9 m
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图 9. 利用无限远前后零位补偿方法设计的原理实验光路图
Fig. 9. Optical layout of principle experiment designed by using front and back null compensation for infinite optical path
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图 10. 利用无限远前后零位补偿方法设计的原理实验中的面形波前误差
Fig. 10. Surface wavefront error in principle experiment designed by using front and back null compensation for infinite optical path
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图 11. 利用无限远后零位补偿方法设计的光路图
Fig. 11. Optical layout designed by using back null compensation for infinite optical path
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图 12. 利用无限远后零位补偿方法设计的面形波前误差
Fig. 12. Surface wavefront error designed by using back null compensation for infinite optical path
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图 13. 实验装置
Fig. 13. Experiment prototype
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图 14. 实测的面形波前误差
Fig. 14. Test result of wavefront error
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表 1不同β2下计算所得的光学参数
Table1. Optical parameters calculated for different β2
| Lens | Optical parameter | β2=1.10 | β2=1.35 | β2=1.60 | β2=1.70 |
|---|
| r1 /mm | 0.34776 | 0.09976 | 0.03195 | 0.03412 | | Back null compensation lens | r2 /mm | -0.05455 | -0.06242 | 0.27777 | -0.34637 | | Thickness /mm | 0.01 | 0.01 | 0.01 | 0.01 | | r3 /mm | 0.13997 | -0.24919 | -2.49594 | -0.10603 | | Front null compensation lens | r4 /mm | 0.21677 | -0.09689 | -0.09925 | -0.04629 | | Thickness /mm | 0.01 | 0.01 | 0.01 | 0.01 | | Distance between two lens /mm | 0.173 | 0.138 | 0.120 | 0.104 | | Distance between front compensationlens and aspheric mirror /mm | 0.905 | 0.904 | 0.904 | 0.904 |
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表 2采用前后零位补偿方法设计的R=9 m的凹非球面镜的光学参数
Table2. Optical parameters of concave aspheric mirror with R= 9 m designed by using front and back null compensation
| Optical element | Surface shape | Radius ofcurvature /mm | Asphericcoefficient | Diameter | Material |
|---|
| Aspheric mirror | Conic | 9000 | e2=1 | 3.7 m | Metal or glass | | Back null compensation lens | Spherical | 1098.5 and 575.6 | 0 | 370 mm | K9 | | Front null compensation lens | Spherical | 707.1 and 504.1 | 0 | 370 mm | K9 |
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表 3容差参数
Table3. Tolerance parameters
| Tolerance parameter | Back null compensation lens | Front null compensation lens |
|---|
| Refractive index | 0.0005 | 0.0005 | | Decentering distance /mm | 0.004 | 0.004 | | Tilt angle /(°) | 0.0008 | 0.0008 | | Thickness /mm | 0.02 | 0.02 | | Radius of curvature /mm | 0.1 | 0.1 | | RMS of surface wavefront error | λ/40 | λ/40 |
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表 4利用无限远前后零位补偿方法设计的原理实验参数
Table4. Optical parameters of principle experiment designed by using front and back null compensation for infinite optical path
| Type | Radius /mm | Thickness /mm | Glass | Diameter /mm | e2 |
|---|
| Standard | Infinity | 100 | Air | 50 | 0 | | Standard | 128.93 | 15 | K9 | 50 | 0 | | Standard | -74.01 | 146.26 | Air | 50 | 0 | | Standard | -87.34 | 10 | K9 | 50 | 0 | | Standard | -61.36 | 917.25 | Air | 50 | 0 | | Standard | -1000 | -917.25 | Reflector | 500 | 1.000 | | Standard | -61.36 | -10.00 | K9 | 50 | 0 | | Standard | -87.34 | -146.26 | Air | 50 | 0 | | Standard | -74.01 | -15 | K9 | 50 | 0 | | Standard | 128.93 | -100 | Air | 50 | 0 |
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表 5利用无限远后零位补偿方法设计的实验参数
Table5. Optical parameters designed by using back null compensation for infinite optical path
| Type | Radius /mm | Thickness /mm | Glass | Diameter /mm | e2 |
|---|
| Standard | Infinity | 100 | Air | 43 | 0 | | Standard | 32.25 | 10 | K9 | 43 | 0 | | Standard | 39.90 | 91.17 | Air | 43 | 0 | | Standard | 204.62 | 5 | K9 | 15 | 0 | | Standard | -71.76 | 1052.28 | Air | 15 | 0 | | Standard | -1000 | -1052.28 | Reflector | 430 | 1.000 | | Standard | -71.76 | -5 | K9 | 15 | 0 | | Standard | 204.62 | -91.17 | Air | 15 | 0 | | Standard | 39.90 | -10 | K9 | 43 | 0 | | Standard | 32.25 | -100 | Air | 43 | 0 |
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表 6两种方案的容差比较
Table6. Tolerance comparison of two test configurations
| Optical system | Alignment error | Change of RMS of surfacewavefront error /λ |
|---|
| Test system by usingfront null compensation andback null compensation for infinite optical path | Decenter distance is 0.002 mm forback null compensation lens | 0.0072 | | Tilt angle is 0.0008° for back nullcompensation lens | 0.0032 | | Decenter distance is 0.002 mm forfront null compensation lens | 0.0043 | | Tilt angle is 0.0008° for front nullcompensation lens | 0.00098 | | Estimated RMS of surface wavefront errorafter 300 Monte Carlo analyses | 0.0083 | | OFFNER system byusing back null compensationfor infinite optical path | Decenter distance is 0.002 mmfor back null compensation lens | 0.0101 | | Tilt angle is 0.0008° forback null compensation lens | 0.0023 | | Decenter distance is 0.002 mm forfront null compensation lens | 0.0071 | | Tilt angle is 0.0008° for front nullcompensation lens | 0.00023 | | Estimated RMS of surface wavefronterror after 300 Monte Carlo analyses | 0.0110 |
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王欣, 刘强, 周浩, 贾建军, 舒嵘. 无限远前后零位补偿结合的非球面检验[J]. 光学学报, 2020, 40(17): 1722003. Xin Wang, Qiang Liu, Hao Zhou, Jianjun Jia, Rong Shu. Aspheric Test Combining Front and Back Null Compensation for Infinite Optical Path[J]. Acta Optica Sinica, 2020, 40(17): 1722003.
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