强激光与粒子束, 2015, 27 (9): 091002, 网络出版: 2015-11-30  

微透镜阵列误差对半导体激光匀化性能的影响

Effects of microlens array error on performance of diode laser
作者单位
1 军械工程学院 电子与光学工程系, 河北 石家庄 050003
2 装备学院 航天指挥系, 北京 101416
3 中国科学院 重庆绿色智能技术研究院 集成光电技术研究中心, 重庆 400714
摘要
为了减小微透镜阵列误差对匀化光斑的影响,深入研究微透镜阵列光束匀化系统中微透镜阵列相对位置误差对光束匀化性能的影响,设计了一种微透镜阵列光束匀化系统。依据相对位置误差类型的不同,将双列微透镜阵列间六个自由度变化导致的误差分为距离误差、偏移误差以及转动误差进行分析,并对每种误差对光束匀化性能的影响进行了研究。采用6板条半导体激光器堆栈对上述匀化系统进行实验验证,实现了均匀性为90.75%的光斑,并对系统影响光斑性能的原因进行了分析。beam homogenization
Abstract
In order to minimize the effect of microlens array position error on homogenized spot, the influence of microlens array relative position error on diode laser beam homogenized performance is deeply researched, and a laser diode beam homogenization system based on microlens array has been designed. The position errors owning to the variation of six degrees of freedom between two arrays are classified into distance error, offset error and roll error, and the effects of the three position errors on beam homogenized performance are researched. The homogenization system is examined by the use of a laser diode array consist of 6 Bars, a uniform pumped spot with 90.75% homogeneity is achieved, and the factor influencing the spot homogeneity is analyzed.
参考文献

[1] Huang R K, Chann B, Missaggia L J, et al. High-brightness wavelength beam combined semiconductor laser diode arrays[J]. IEEE photo Technol Lett, 2007, 19(4):209-211.

[2] Timmermannn A, Meinschien J, Bruns P, et al. Next generation high-brightness diode lasers offer new industrial applications[C]//Proc of SPIE. 2008:6876U.

[3] 曹银花, 刘友强, 秦文斌, 等. 光束质量超过全固态激光器的千瓦直接半导体激光器[J]. 中国激光, 2009, 36(9):2282-2285.

    Cao Yinhua, Liu Youqiang, Qin Wenbin, et al. Kilowatt diode laser with beam quality better than all-solid-state laser. Chinese J Lasers, 2009, 36(9):2282-2285

[4] Dickey F M, Holswade S C. Laser beam shaping: theory and techniques[M]. New York: Marcel Dekker Inc, 2000.

[5] Bachmann F, Loosen P, Poprawe R. High power diode lasers[M]. New York: Springer, 2007.

[6] Haiyin S. Laser Diode beam basics, manipulations and characterizations[M]. New York: Springer, 2012.

[7] 王振国, 段文涛, 郑建刚, 等. 大面阵激光二极管阵列端面泵浦耦合技术[J]. 强激光与粒子束, 2012, 24(7): 1683-1686.

    Wang Zhenguo, Duan Wentao, Zheng Jiangang, et al. End-pumped coupling system based on large-aperture laser diode array. High Power Laser and Particle Beams, 2012, 24(7): 1683-1686

[8] 武德勇, 吕文强, 魏彬, 等. 高功率叠阵二极管激光器光束整形[J]. 强激光与粒子束, 2014, 26: 101001.

    Wu Deyong, Lv Wenqiang, Wei Bin, et al. Beam reshape of high power laser diode stack. High Power Laser and Particle Beams, 2014, 26: 101001.

[9] 刘晓娟, 傅汝廉, 秦华, 等. LDA耦合系统透镜导管的理论与实验研究[J]. 光学精密工程, 2006,14(2):167-172.

    Liu Xiaojuan, Fu Rulian, Qin Hua, et al. Theoretical and experimental research on lens duct for LDA coupling. Optics and Precision Engineering, 2006,14(2):167-172

[10] 郜洪云, 傅汝廉, 秦华, 等. LDA端泵浦固体激光器的新型耦合系统—圆锥形导管[J]. 光电子·激光, 2006,17(4):419-423.

    Gao Hongyun, Fu Rulian, Qin Hua, et al. Novel coupling system in solidstate laser end-pumped by LDA-taper duct. Journal of Optoelectronics· Laser, 2006,17(4):419-423

[11] Schreiber P, Dannberg P, Hoefer B, et al. Chirped microlens arrays for diode laser circularization and beam expansion[C]//Proc of SPIE. 2005:58760k.

[12] Wippermann F, Zeitner U D, Dannberg P, et al. Beam homogenizers based on chirped microlens arrays[J]. Optics Express, 2007, 15(10):6218-6231.

[13] 殷智勇, 汪岳峰, 尹韶云, 等. 微透镜变化对半导体激光器光束匀化效果的影响[J].强激光与粒子束, 2013,25(10):2556-2560.

    Yin Zhiyong, Wang Yuefeng, Yin Shaoyun, et al. Impact of microlens changes on the homogenization effect of semiconductor laser beam. High Power Laser and Particle Beams, 2013,25(10):2556-2560

[14] 汪岳峰, 雷呈强, 殷智勇, 等. 半导体激光器堆栈填充因子对慢轴光束准直的影响[J]. 强激光与粒子束, 2015, 27:051010.

    Wang Yuefeng, Lei Chengqiang, Yin Zhiyong, et al. Impact of fill factor on collimation of diode laser stack slow axis beam. High Power Laser and Particle Beams, 2015, 27:051010

雷呈强, 汪岳峰, 殷智勇, 尹韶云, 孙秀辉, 杜春雷. 微透镜阵列误差对半导体激光匀化性能的影响[J]. 强激光与粒子束, 2015, 27(9): 091002. Lei Chengqiang, Wang Yuefeng, Yin Zhiyong, Yin Shaoyun, Sun Xiuhui, Du Chunlei. Effects of microlens array error on performance of diode laser[J]. High Power Laser and Particle Beams, 2015, 27(9): 091002.

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